Micro-fabrication of polymeric devices using hot roller embossing

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 933-936

  Yeo, Lip Pin ^a   Ng, Sum Huan ^a   Wang, Zhenfeng ^a   Wang, Zhiping ^a   de Rooij, Nicolaas Frans ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Mold channel orientation; Pattern density effects; Patterning; Polymer replication; Roller hot embossing

Indexed keywords

CHANNEL DEPTHS; EMBOSSING MACHINES; HIGH THROUGHPUTS; HOT EMBOSSING PROCESS; MICRO FABRICATIONS; PATTERN DENSITY EFFECTS; PATTERN TRANSFERS; PATTERNING; POLYMER REPLICATION; POLYMERIC DEVICES; POLYMERIC MICROFLUIDIC DEVICES; PROCESS OPTIMIZATIONS; PROCESS PARAMETERS; REPLICATION METHODS; ROLL TO ROLLS; ROLLER HOT EMBOSSING; ROLLER SPEED; WEB PROCESSING;

FLUIDIC DEVICES; MOLDS; PROCESSING; ROLLERS (MACHINE COMPONENTS);

POLYMERS;

EID: 67349157146     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.021     Document Type: Article

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