Fabrication of electroosmotic flow pump on polymethylmethacrylate substrate using hot embossing

Key Engineering Materials

Volumn 538, Issue , 2013, Pages 125-128

  Saito, Hirofumi ^a   Komatsuzaki, Hiroki ^a   Ikoma, Ryuta ^a   Komori, Takayuki ^a   Kuroda, Keigo ^a   Kimura, Yohta ^a   Fukushi, Yudai ^a   Maenosono, Hirotaka ^a   Koide, Syohei ^a   Satano, Masahiro ^a   Nishioka, Yasushiro ^a  

^a NIHON UNIVERSITY   (Japan)

Author keywords

Electroosmotic flow; Hot embossing; UV ozone

Indexed keywords

ADHESION; ALUMINUM COATINGS; ELECTRODES; ELECTROOSMOSIS; FABRICATION; FUNCTIONAL MATERIALS; MICROCHANNELS; OZONE; OZONE LAYER; POLYESTERS; PUMPS;

ALUMINUM ELECTRODES; ELECTROOSMOTIC FLOW; ENHANCED ADHESIONS; FABRICATION PROCESS; HOT-EMBOSSING; PMMA SUBSTRATES; UV OZONE; UV-OZONE TREATMENT;

SUBSTRATES;

EID: 84873659500     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.538.125     Document Type: Conference Paper

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