Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process

Microelectronic Engineering

Volumn 84, Issue 2, 2007, Pages 355-361

  Chang, Chih Yuan ^a   Yang, Sen Yeu ^a   Chu, Ming Hui ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Hot embossing; Microlens array; Roller stamping; UV curable polymer

Indexed keywords

CASTING; PLASTIC FILMS; POLYCARBONATES; POLYMERS; STAMPING; ULTRAVIOLET RADIATION;

HOT EMBOSSING; MICROLENS ARRAYS; ROLLER STAMPING; SOFT ROLLER STAMPING PROCESS; UV CURABLE POLYMERS;

MICROLENSES;

EID: 33846202968     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.11.004     Document Type: Article

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