Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device

Journal of Materials Processing Technology

Volumn 202, Issue 1-3, 2008, Pages 76-85

  Youn, Sung Won ^a   Ogiwara, Mayuko ^a   Goto, Hiroshi ^a   Takahashi, Masaharu ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Cycloolefin resin; Large area replication; Polyethylene terephthalate (PET); Roll to plate; Roller imprint lithography; Thermal roller nano micro imprint system

Indexed keywords

OLEFINS; OPTICAL DEVICES; POLYETHYLENE TEREPHTHALATES; POLYMER FILMS;

CYCLOOLEFIN RESIN; LARGE AREA REPLICATION; LIGHT GUIDE PLATE (LGP); ROLL-TO-PLATE; ROLLER IMPRINT LITHOGRAPHY; THERMAL ROLLER NANO/MICRO-IMPRINT SYSTEM;

LITHOGRAPHY;

EID: 42949169953     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.08.069     Document Type: Article

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