Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process

Materials and Design

Volumn 30, Issue 9, 2009, Pages 3879-3884

  Lan, Shuhuai ^a,c   Lee, Hey Jin ^b   Lee, Soo Hun ^c   Ni, Jun ^d   Lai, Xinmin ^a   Lee, Hyoung Wook ^e   Song, Jung Han ^b   Lee, Moon G ^c  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b Korea Institute of Industrial Technology   (South Korea)

^c Ajou University   (South Korea)

^d The Department of Civil and Environmental Engineering   (United States)

^e Chungju National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS GLASSY POLYMERS; DEFORMATION BEHAVIOR; EXPERIMENTAL DATA; FE ANALYSIS; FE MODEL; FINITE ELEMENT ANALYSIS; GENERALIZED MAXWELL MODEL; GLASS TRANSITION TEMPERATURE; MATERIAL MODELS; NUMERICAL STUDIES; PATTERN REPLICATION; TEST DATA; THERMAL IMPRINT; VISCO-ELASTIC MATERIAL; VISCOELASTIC MODELS; VISCOELASTIC PROPERTIES;

BEAMS AND GIRDERS; GLASS; MATERIALS; SUPERCONDUCTING TRANSITION TEMPERATURE; TESTING; VISCOELASTICITY;

GLASS TRANSITION;

EID: 67349196368     PISSN: 02641275     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matdes.2009.03.045     Document Type: Article

References (11)

1. Chou S.Y., Krauss P.R., and Renstrom P.J. Imprint of sub-25 nm vias and trnches in polymers. Appl Phys Lett 67 (1995) 3114
2. Makela T., Haatainen T., Majander P., and Ahopelto J. Continuous roll to roll nanoimprinting of inherently conducting polyaniline. Microelectron Eng 84 (2007) 877-879
3. Shan X.C., Ikehara T., Murakoshi Y., and Maeda R. Applications of micro hot embossing for optical switch formation. Sens Actuators, A Phys 119 (2005) 433-440
4. Leech P.W., Lee R.A., Sexton B.A., and Smith F. Hot embossing of micrographic elements in polypropylene. Microelectron Eng 84 (2007) 109-113
5. Charest J.L., Bryant L.E., Garcia A.J., and King W.P. Hot embossing for micropatterned cell substrates. Biomaterials 25 (2004) 4767-4775
6. Chien R.D. Hot embossing of microfluidic platform. Int Commun Heat Mass 33 (2006) 645-653
7. Guo L.J. Recent progress in nanoimprint technology and its applications. J Phys D Appl Phys 37 (2004) 123-141
8. Show M.T., and MacKnight W.J. Introduction to polymer viscoelasticity. 1st ed. (2005), John Wiley & Sons, Hoboken (NJ)
9. ABAQUS Inc. Documentation, version 6.7; 2007.
10. Williams M., Landel R.F., and Ferry J.D. J Am Chem Soc 77 (1954) 3701
11. .