A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers

Journal of Micromechanics and Microengineering

Volumn 20, Issue 6, 2010, Pages

  Taylor, Hayden ^a   Hale, Melinda ^a   Lam, Yee Cheong ^b   Boning, Duane ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATED SIMULATIONS; AREAL DENSITIES; DEVICE DESIGN; FAST SIMULATION; FEATURE SHAPE; MECHANICAL IMPULSE; MULTIPLE LEVELS; PATTERN REPLICATION; SIMULATION PROCEDURES; SIMULATION SPEED; SINGLE LOCATION; SPATIAL RESOLUTION; STAMP DESIGN; THERMOPLASTIC POLYMER; VISCOELASTIC PROPERTIES;

ABSTRACTING; DESIGN; IMPULSE RESPONSE; MECHANICAL PROPERTIES; POLYMERS; PRESSURE DISTRIBUTION; SURFACE TOPOGRAPHY;

PRECISION ENGINEERING;

EID: 77952331155     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/065001     Document Type: Article

References (23)

1. Juang Y-J, Lee L J and Koelling K W 2002 Hot embossing in microfabrication: Part I. Experimental Polym. Eng. Sci. 42 539-50
2. Juang Y-J, Lee L J and Koelling K W 2002 Hot embossing in microfabrication: Part II. Rheological characterization and process analysis Polym. Eng. Sci. 42 551-66
3. Chen S C, Lin M C, Chien R D and Liaw W L 2005 Hot embossing of micro-featured devices Proc. Soc. Plast. Eng. Annu. Tech. Conf. 2 260-4
4. Heckele M, Bacher W and Mueller K D 1998 Hot embossing-the molding technique for plastic microstructures Microsyst. Technol. 4 122-4
5. Guo Y, Liu G, Xiong Y and Tian Y 2007 Study of the demolding process-implications for thermal stress, adhesion and friction control J. Micromech. Microeng. 17 9-19
6. Luo Y, Xu M, Wang W D and Liu C 2006 Finite element analysis of PMMA microfluidic chip based on hot embossing technique J. Phys.: Conf. Ser. 48 1102-6
7. Lin C-R, Chen R-H and Hung C 2003 Finite element analysis of hot embossing of polymer optical sheet Mater. Sci. Forum 437-438 379-82
8. Takagi H, Takahashi M, Maeda R, Onishi Y, Iriye Y, Iwasaki T and Hirai Y 2008 Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process Microelectron. Eng. 85 902-6
9. Ames N M, Srivastava V, Chester S A and Anand L 2009 A thermo-mechanically coupled theory for large deformations of amorphous polymers. Part II: Applications Int. J. Plast. 25 1495-539
10. Worgull M, Heckele M, Hetu J F and Kabanemi K K 2006 Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication J. Microlithogr., Microfabrication, Microsyst. 5 011005
11. Lin C-R, Chen R-H and Hung C 2002 The characterization and finite-element analysis of a polymer under hot pressing Int. J. Adv. Manuf. Technol. 20 230-5
12. Taylor H, Lam Y C and Boning D 2009 A computationally simple method for simulating the micro-embossing of thermoplastic layers J. Micromech. Microeng. 19 075007
13. Rowland H D, King W P, Sun A C and Schunk P R 2005 Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography J. Micromech. Microeng. 15 2414-25
14. Rowland H D, King W P, Sun A C and Schunk P R 2005 Simulations of nonuniform embossing: the effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography J. Vac. Sci. Technol. B 23 2958-62
15. Hirai Y, Konishi T, Yoshikawa T and Yoshida S 2004 Simulation and experimental study of polymer deformation in nanoimprint lithography J. Vac. Sci. Technol. B 22 3288-93 (Pubitemid 40185116)
16. Scheer H-C and Schulz H 2001 A contribution to the flow behavior of thin polymer films during hot embossing lithography Microelectron. Eng. 56 311-32
17. The Mathworks 2008 MatLab User's Manual
18. Taylor H 2009 Modeling and controlling topographical nonuniformity in thermoplastic micro- and nano-embossing PhD Dissertation Massachusetts Institute of Technology, Cambridge, MA
19. Hardt D E, Anthony B W and Tor S B 2008 A teaching factory for polymer microfabrication νFac Proc. 6th Int. Symp. on Nanomanufacturing (Athens, Greece, 12-14 November 2008)
20. Autodesk 2009 DXF Format Reference
21. Hale M 2009 Development of a low-cost, rapid-cycle hot embossing system for microscale parts SM Thesis Massachusetts Institute of Technology, Cambridge, MA
22. Taylor H and Boning D 2009 Fast simulation of pattern dependencies in thermal nanoimprint lithography Proc. Nanoimprint and Nanoprint Technology (San Jose, CA)
23. Taylor H, Iliescu C, Ni M, Xing C, Lam Y C and Boning D 2008 Modeling pattern dependencies in the micron-scale embossing of polymeric layers Proc. SPIE 7269 726909-15