A razor-blade test of the demolding energy in a thermoplastic embossing process

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Taylor, Hayden ^a,c   Boning, Duane ^a   Iliescu, Ciprian ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^c SINGAPORE MIT ALLIANCE FOR RESEARCH AND TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AREAL DENSITIES; CIRCULAR POSTS; DEMOLDING; FLUOROPOLYMER COATING; MECHANICAL WORK; QUICK TESTS; SEMI-CONDUCTOR WAFER; SILICON MOLDS; WORK OF FRACTURE;

AMORPHOUS SILICON; FLUORINE CONTAINING POLYMERS; FRACTURE; MOLDS; POLYMERS; SILICON CARBIDE; SILICON WAFERS;

TESTING;

EID: 79957960484     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/067002     Document Type: Article

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