Hot roller embossing for microfluidics: Process and challenges

Microsystem Technologies

Volumn 15, Issue 8, 2009, Pages 1149-1156

  Ng, S H ^a   Wang, Z F ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECTIONAL EFFECTS; FEATURE SIZES; HIGHER TEMPERATURES; LATERAL DIMENSION; MASS PRODUCTION; MICROFLUIDIC CHIP; OPTIMUM TEMPERATURE; PILE-UP; POLYMER BASED; POLYMER MATERIALS; ROLLING DIRECTION; ROLLING SPEED;

MICROFLUIDICS; ROLLERS (MACHINE COMPONENTS);

ROLLING;

EID: 67649207983     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0722-0     Document Type: Conference Paper

References (5)

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2. Herzig HP (1997) Micro-optics: elements, systems and applications. Taylor & Francis, London
3. SH Ng ZF Wang RT Tjeung NF de Rooij 2007 Development of a multi-layer microelectrofluidic platform J Microsyst Microsyst 13 1509 1515 10.1007/s00542-006-0341-6
4. H Schift M Halbeisen U Schutz B Delahoche K Vogelsang J Gobrecht 2006 Surface structuring of textile fibers using roll embossing Microelectronic Eng 83 855 858 10.1016/j.mee.2006.01.120
5. H Tan A Gilbertson SY Chou 1998 Roller nanoimprint lithography J Vac Sci Technol B 16 3926 3928 10.1116/1.590438 (Pubitemid 128601046)