Microstructure formation via roll-to-roll UV embossing using a flexible mould made from a laminated polymercopper film

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Zhong, Z W ^a   Shan, X C ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER FOILS; DOT ARRAY; FEATURE SIZES; FUNCTIONAL DEVICES; FUNCTIONAL FILMS; HIGH THROUGHPUT; HYBRID FILM; LARGE FORMAT; LOW COSTS; MICRO-SCALE STRUCTURES; MICROFEATURES; MICROSTRUCTURE FORMATION; PROCESS DEVELOPMENT; ROLL TO ROLL; UV EMBOSSING;

FABRICATION; LAMINATING; LIQUID CRYSTAL POLYMERS; SUBSTRATES;

MOLDS;

EID: 84864482749     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085010     Document Type: Article

References (39)

1. Gates B D, Xu Q B, Stewart M, Ryan D, Willson C G and Whitesides G M 2005 New approaches to nanofabrication: molding, printing, and other techniques Chem. Rev. 105 117196 (Pubitemid 40600879)
2. Sotomayor Torres C M et al 2003 Nanoimprint lithography: an alternative nanofabrication approach Mater. Sci. Eng. C 23 2331 (Pubitemid 36154677)
3. Guo L J 2004 Recent progress in nanoimprint technology and its applications J. Phys. D: Appl. Phys. 37 R12341
4. Guo L J 2007 Nanoimprint lithography: methods and material requirements Adv. Mater. 19 495513 (Pubitemid 46942304)
5. Schift H 2008 Nanoimprint lithography: An old story in modern times? A review J. Vac. Sci. Technol. B 26 45880 (Pubitemid 351474145)
6. Ahn S H and Guo L J 2008 High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates Adv. Mater. 20 20449
7. Ahn S H and Guo L J 2009 Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting ACS Nano 3 230410
8. Chou S Y, Krauss P R and Renstrom P J 1995 Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 67 31146
9. Zhong Z W, Shan X C and Yao Y C 2010 Investigation of antiadhesive coatings for nanoimprinting lithography Mater. Manuf. Process. 25 65864
10. Heckele M, Guber A E and Truckenmuller R 2006 Replication and bonding techniques for integrated microfluidic systems Microsyst. Technol. 12 10315 (Pubitemid 44267997)
11. Shiu P P, Knopf G K, Ostojic M and Nikumb S 2008 Rapid fabrication of tooling for microfluidic devices via laser micromachining and hot embossing J. Micromech. Microeng. 18 025012
12. Li J M, Liu C, Qiao H C, Zhu L Y, Chen G and Dai X D 2008 Hot embossing/bonding of a poly(ethylene terephthalate) (PET) microfluidic chip J. Micromech. Microeng. 18 015008
13. Ahn S, Cha J, Myung H, Kim S-m and Kang S 2006 Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns Appl. Phys. Lett. 89 213101 (Pubitemid 44892299)
14. Kololuoma T K, Tuomikoski M, Makela T, Heilmann J, Haring T, Kallioinen J, Hagberg J, Kettunen I and Kopola H K 2004 Towards roll-to-roll fabrication of electronics, optics, and optoelectronics for smart and intelligent packaging Proc. SPIE 5363 7785
15. Velten T, Schuck H, Richter M, Klink G, Bock K, Malek C K, Roth S, Schoo H and Bolt P J 2008 Microfluidics on foil: state of the art and new developments Proc. Inst. Mech. Eng. B 222 10716
16. Nagato K, Sugimoto S, Hamaguchi T and Nakao M 2010 Iterative roller imprint of multilayered nanostructures Microelectron. Eng. 87 15435
17. Mäkelä T, Haatainen T, Majander P and Ahopelto J 2007 Continuous roll to roll nanoimprinting of inherently conducting polyaniline Microelectron. Eng. 84 8779 (Pubitemid 46678307)
18. Krebs F C 2009 All solution roll-to-roll processed polymer solar cells free from indium-tin-oxide and vacuum coating steps Org. Electron. 10 7618
19. Yeo L P, Ng S H, Wang Z F, Xia H M, Wang Z P, Thang V S, Zhong Z W and de Rooij N F 2010 Investigation of hot roller embossing for microfluidic devices J. Micromech. Microeng. 20 015017
20. Zhong Z W, Shan X C and Wong S J 2011 Roll-to-roll large-format slot die coating of photosensitive resin for UV embossing Microsyst. Technol. 17 170311
21. Becker H and Gartner C 2008 Polymer microfabrication technologies for microfluidic systems Anal. Bioanal. Chem. 390 89111
22. Schift H, Halbeisen M, Schutz U, Delahoche B, Vogelsang K and Gobrecht J 2006 Surface structuring of textile fibers using roll embossing Microelectron. Eng. 83 8558
23. Chang C Y, Yang S Y and Sheh J L 2006 A roller embossing process for rapid fabrication of microlens arrays on glass substrates Microsyst. Technol. 12 7549 (Pubitemid 43814545)
24. Jiang L T, Huang T C, Chang C Y, Ciou J R, Yang S Y and Huang P H 2008 Direct fabrication of rigid microstructures on a metallic roller using a dry film resist J. Micromech. Microeng. 18 015004
25. Ishizawa N, Idei K, Kimura T, Noda D and Hattori T 2008 Resin micromachining by roller hot embossing Microsyst. Technol. 14 13818
26. Shan X C, Soh Y C, Shi C W P, Jin L and Lu C W 2009 A micro roller embossing process for structuring large-area substrates of laminated ceramic green tapes Microsyst. Technol. 15 131925
27. Liu S J and Chang Y C 2007 A novel soft-mold roller embossing method for the rapid fabrication of micro-blocks onto glass substrates J. Micromech. Microeng. 17 1729 (Pubitemid 46476602)
28. Park I, Lim S H, Shin D, Lee K S, Jang S, Yim H J, Won C and Jeong J I 2009 Heat transfer analysis during a curing process for UV nanoimprint lithography J. Mech. Sci. Technol. 23 92730
29. Lee N Y and Kim Y S 2007 A poly(dimethylsiloxane)-coated flexible mold for nanoimprint lithography Nanotechnology 18 415303 (Pubitemid 47479636)
30. Lee N Y and Kim Y S 2007 A simple imprint method for multi-tiered polymer nanopatterning on large flexible substrates employing a flexible mold and hemispherical PDMS elastomer Macromol. Rapid Commun. 28 19952000 (Pubitemid 350001093)
31. Zhang J, Cui B and Ge H X 2011 Fabrication of flexible mold for hybrid nanoimprint-soft lithography Microelectron. Eng. 88 21925
32. Lee J, Park S, Choi K and Kim G 2008 Nano-scale patterning using the roll typed UV-nanoimprint lithography tool Microelectron. Eng. 85 8615
33. Lan S H, Song J H, Lee M G, Ni J, Lee N K and Lee H J 2010 Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate Microelectron. Eng. 87 2596601
34. Weng Y J, Weng Y C, Yang S Y and Wong J L 2009 A novel electromagnetism-assisted imprinting technology to replicate microstructures onto a large-area curved surface using a flexible magnetic mold Polym. Adv. Technol. 20 927
35. Hamouda F, Barbillon G, Gaucher F and Bartenlian B 2010 Sub-200 nm gap electrodes by soft UV nanoimprint lithography using polydimethylsiloxane mold without external pressure J. Vac. Sci. Technol. B 28 825
36. Koo N, Otto M, Kim J W, Jeong J H and Kurz H 2011 Press and release imprint: control of the flexible mold deformation and the local variation of residual layer thickness in soft UV-NIL Microelectron. Eng. 88 10336
37. Koo N, Plachetka U, Otto M, Bolten J, Jeong J H, Lee E S and Kurz H 2008 The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography Nanotechnology 19 225304 (Pubitemid 351652154)
38. Lee Y C, Chen B T, Wu T H and Chou Y Y 2012 Full wafer microstructure fabrication by continuous UV-assisted roller imprinting lithography to enhance light extraction of LEDs Microelectron. Eng. 91 649
39. McClelland G M, Hart M W, Rettner C T, Best M E, Carter K R and Terris B D 2002 Nanoscale patterning of magnetic islands by imprint lithography using a flexible mold Appl. Phys. Lett. 81 14835 (Pubitemid 34992939)