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Microsystem Technologies
Volumn 16, Issue 8-9, 2010, Pages 1385-1392
Development of separated micromold system for an efficient replication of high aspect ratio microstructures
Author keywords

[No Author keywords available]
Indexed keywords

DEEP X-RAY LITHOGRAPHY; DEMOLDING; FABRICATION PROCESS; HIGH ASPECT RATIO; HIGH ASPECT RATIO MICROSTRUCTURES; HIGH ASPECT RATIO STRUCTURES; HOT EMBOSSING PROCESS; MICRO MOLDS; MICRO-SCALES; NICKEL ELECTROFORMING;
EID: 77955847613     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0990-3     Document Type: Conference Paper
Times cited : (8)
References (9)
  • 1
    • 0022717983 scopus 로고
    • Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoformung, and plastic moulding (LIGA process)
    • Becker EW, Ehrfeld W, Hagmann P, Manner A, Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoformung, and plastic moulding (LIGA process). Micro-electron Eng 4:35-56
    • (1986) Micro-electron Eng , vol.4 , pp. 35-56
    • Becker, E.W.1    Ehrfeld, W.2    Hagmann, P.3    Manner, A.4    Münchmeyer, D.5
  • 4
    • 33847288208 scopus 로고    scopus 로고
    • Analysis of the demolding forces during hot embossing
    • Guo Y, Liu G, Zhu X, Tian Y (2007) Analysis of the demolding forces during hot embossing. Microsyst Technol 13:411-415
    • (2007) Microsyst Technol , vol.13 , pp. 411-415
    • Guo, Y.1    Liu, G.2    Zhu, X.3    Tian, Y.4
  • 5
    • 1242332743 scopus 로고    scopus 로고
    • A modified DXRL process for fabricating a polymer microstructure
    • Kim JT, Han S-P, Jeong MY (2004) A modified DXRL process for fabricating a polymer microstructure. J Micromech Microeng 14:256-262
    • (2004) J Micromech Microeng , vol.14 , pp. 256-262
    • Kim, J.T.1    Han, S.-P.2    Jeong, M.Y.3
  • 6
    • 10044228644 scopus 로고    scopus 로고
    • Replication of microlens array by injection molding
    • Lee B-K, Kim DS, Kwon TH (2004) Replication of microlens array by injection molding. Microsyst Technol 10:531-535
    • (2004) Microsyst Technol , vol.10 , pp. 531-535
    • Lee, B.-K.1    Kim, D.S.2    Kwon, T.H.3
  • 7
    • 65949104522 scopus 로고    scopus 로고
    • Biomimetic design and fabrication of components for artificial hair cell sensor
    • doi: 10.1109/MEMSYS.2009.4805501
    • Lee HS, Lee B-K, Kwon TH (2009) Biomimetic design and fabrication of components for artificial hair cell sensor. Proc IEEE-MEMS 789-792. doi: 10.1109/MEMSYS.2009.4805501
    • (2009) Proc IEEE-MEMS , pp. 789-792
    • Lee, H.S.1    Lee, B.-K.2    Kwon, T.H.3
  • 8
    • 13244287972 scopus 로고    scopus 로고
    • The properties of demoulding of Ni and Ni-PTFE moulding inserts
    • Peng Z, Gang L, Yangchao T, Xuehong T (2005) The properties of demoulding of Ni and Ni-PTFE moulding inserts. Sens Actuator A Phys 118:338-341
    • (2005) Sens Actuator A Phys , vol.118 , pp. 338-341
    • Peng, Z.1    Gang, L.2    Yangchao, T.3    Xuehong, T.4
  • 9
    • 0343844420 scopus 로고    scopus 로고
    • Adhesion improvement in the deep X-ray lithography process using a central beam-stop
    • Pérennès F, Pantenburg FJ (2001) Adhesion improvement in the deep X-ray lithography process using a central beam-stop. Nucl Instrum Methods Phys Res B 174:317-323
    • (2001) Nucl Instrum Methods Phys Res B , vol.174 , pp. 317-323
    • Pérennès, F.1    Pantenburg, F.J.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.