SCOPUS 정보 검색 플랫폼

Volumn 17, Issue 7, 2007, Pages 1220-1231

Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; TEMPERATURE DISTRIBUTION;

IMPRINTED POLYMER RESIST THICKNESS; MOLD GEOMETRIES; POLYMER FLOW; ULTRASONIC NANOIMPRINT LITHOGRAPHY;

NANOIMPRINT LITHOGRAPHY;

GEOMETRY; LITHOGRAPHY; SIMULATION; TEMPERATURE;

EID: 34547595558 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/17/7/002 Document Type: Article

Times cited : (25)

References (11)

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