Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing

Journal of Micromechanics and Microengineering

Volumn 20, Issue 4, 2010, Pages

  Saha, B ^a   Liu, E ^b   Tor, S B ^a,b   Khun, N W ^b   Hardt, D E ^c   Chun, J H ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE FORCE; ADHESIVE STRENGTH; BALL-ON-DISK; BONDING STRUCTURE; COATED SAMPLE; COMPARATIVE STUDIES; CYCLIC OLEFIN COPOLYMERS; DC MAGNETRON CO-SPUTTERING; DEMOLDING STRESS; DLC COATINGS; EMERGING TECHNOLOGIES; FRICTION COEFFICIENTS; HIGH SURFACE-TO-VOLUME RATIO; HIGH THROUGHPUT; HOT-EMBOSSING; LARGE FRICTION; LOW COSTS; MICRO RAMAN SPECTROSCOPY; MICRO-MOLDS; MICRO-SCRATCH TEST; MICROFEATURES; NANO-SCALE PATTERNS; NANOFABRICATION; NITROGEN-DOPED DIAMOND; SURFACE ENERGIES; SURFACE FORCES; TRIBOLOGICAL BEHAVIORS; TRIBOLOGICAL TESTS;

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CONTACT ANGLE; DOPING (ADDITIVES); FRICTION; MOLDS; OLEFINS; PLASTIC COATINGS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TENSION; TITANIUM POWDER METALLURGY; TRIBOLOGY;

CRYSTAL ATOMIC STRUCTURE;

EID: 77949877277     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/4/045007     Document Type: Article

References (33)

1. Ouyang J H, Sasaki S, Murakami T, Zhou Y and Zhang J 2009 Mechanical and unlubricated tribological properties of titanium-containing diamond-like carbon coatings Wear 266 239-47
2. Sundaram V S 2006 Diamond like carbon film as a protective coating for high strength steel and titanium alloy Surf. Coat. Technol. 201 2707-11
3. Jones D S, Garvin C P, Dowling D, Donnelly K and Gorman S P 2006 Examination of surface properties and in vitro biological performance of amorphous diamond-like carbon-coated polyurethane J. Biomed. Mater. Res. B Appl. Biomater. 78 230-6
4. Milne W I 2003 Electronic devices from diamond-like carbon Semicond. Sci. Technol. 18 S81-5
5. 4V substrate with a silicon interlayer Thin Solid Films 515 375-9
6. Ma T, Hu Y Z, Wang H and Li X 2007 Microstructural and stress properties of ultrathin diamond like carbon films during growth: molecular dynamics simulations Phys. Rev. B 75 035425-8
7. Oka Y, Kirinuki M, Nishimura Y, Azuma K, Fujiwara E and Yatsuzuka M 2004 Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition Surf. Coat. Technol. 186 141-5
8. Monteiro O R and Ogletree M P D 2003 Investigation of non-hydrogenated DLC: Si prepared by cathodic arc Surf. Coat. Technol. 163-164 144-8
9. Saha B, Liu E, Tor S B, Khun N W, Hardt D E and Chun J H 2009 Anti-sticking behavior of DLC-coated silicon micro-molds J. Micromech. Microeng. 19 105025
10. Bendavid A, Martin P J, Comte C, Preston E W, Haq A J, Magdon Ismail F S and Singh R K 2007 The mechanical and biocompatibility properties of DLC-Si films prepared by pulsed DC plasma activated chemical vapor deposition Diam. Relat. Mater. 16 1616-22
11. Gangopadhyay A K, Willermet P A, Tamor M A and Vassell W C 1997 Amorphous hydrogenated carbon films for tribological applications: I. Development of moisture insensitive films having reduced compressive stress Tribol. Int. 30 9-18
12. Baba K, Hatada R, Flege S and Ensinger W 2009 Deposition of silicon-containing diamond-like carbon films by plasma-enhanced chemical vapor deposition Surf. Coat. Technol. 203 2747-50
13. Yeh T A, Lin C L, Sivertsen J M and Judy J H 1993 Friction, wear and elasto-plastic stress analysis of RF-sputtered carbon-nitrogen protective coatings for rigid magnetic storage disks J. Magn. Magn. Mater. 120 314-8
14. Arora M K, Lettington A H and Waterman D R 1999 Amorphous nitrogen containing carbon films deposited by plasma assisted chemical vapor deposition Diam. Relat. Mater. 8 623-7
15. Belligundu S, Shiakolas P S, Pandey A and Aswath P B 2008 A systemic approach toward optimization of the hot embossing of poly-l-lactic acid for biomedical applications J. Biomed. Mater. Res. B Appl. Biomater. 85 469-77
16. Fu G, Tor S B, Loh N H and Hardt D E 2009 Micro-hot-embossing of 316L stainless steel micro-structures Appl. Phys. A Mater. Sci. Process. 97 925-31
17. Chien R D 2006 Hot embossing of microfluidic platform Int. Commun. Heat Mass 33 645-53
18. Song Z, Choi J and You B H 2008 Simulation study on stress and deformation of polymeric patterns during the demolding process in thermal imprint lithography J. Vac. Sci. Technol. B 26 598-605
19. Guo Y, Liu G, Xiong Y, Wang J, Huang X and Tian Y 2007 Study of hot embossing using nickel and Ni-PTFE LIGA mold inserts J. Microelectromech. Syst. 16 589-97
20. Komori M, Uchiyama H, Takebe H, Kusuura T, Kobayashi K, Kuwahara H and Tsuchiya T 2008 Micro/nanoimprinting of glass under high temperature using a CVD diamond mold J. Micromech. Microeng. 18 065013
21. Youn S-W, Noguchi T, Takahashi M and Maeda R 2008 Dynamic mechanical thermal analysis, forming and mold fabrication studies for hot-embossing of a polyimide microfluidic platform J. Micromech. Microeng. 18 045025
22. Guo Y, Liu G, Zhu X and Tian Y 2007 Analysis of the demolding forces during hot embossing Microsyst. Technol. 13 411-5
23. Liu F X and Wang Z L 2009 Thickness dependence of the structure of diamond-like carbon films by Raman spectroscopy Surf. Coat. Technol. 203 1829-32
24. Kaelble D H 1977 A surface energy analysis of bioadhesion Polymer 18 475-82
25. Liu F X, Yao K L and Liu Z L 2007 Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy Diam. Relat. Mater. 16 1746-51
26. Ong S-E, Zhang S, Du H and Sun D 2007 Relationship between bonding structure and mechanical properties of amorphous carbon containing silicon Diam. Relat. Mater. 16 1628-35
27. Wang P, Wang X, Xu T, Liu W and Zhang J 2007 Comparing internal stress in diamond-like carbon films with different structure Thin Solid Films 515 6899-903
28. Fallon P J, Veerasamy V S, Davis C A, Robertson J, Amaratunga G A J, Milne W I and Koskinen J 1993 Properties of filtered-ion-beam-deposited diamond like carbon as a function of ion energy Phys. Rev. B 48 4777-82
29. Wang P, Wang X, Xu T, Liu W and Zhang J 2007 Comparing internal stress in diamond-like carbon films with different structure Thin Solid Films 515 6899-903
30. Marques F C, Lacerda R G, Champi A, Stolojan V, Cox D C and Silva S R P 2003 Thermal expansion coefficient of hydrogenated amorphous carbon Appl. Phys. Lett. 83 3099-101
31. Chen J S, Lau S P, Sun Z, Chen G Y, Li Y J, Tay B K and Chai J W 2001 Metal-containing amorphous carbon films for hydrophobic application Thin Solid Films 398-399 110-5
32. Fowkes F M 1963 Additivity of intermolecular forces at interfaces:1. Determination of contribution to surface and interfacial tension of dispersion forces in various liquids J. Phys. Chem. 67 2538-41
33. Henann D and Anand L 2008 Microscale thermoplastic forming of bulk metallic glasses: numerical simulations and experiments SMA Int. Conf. and 5th Int. Symp. on Nanomanufacturing p 40