Effect of polymer orientation on pattern replication in a micro-hot embossing process: Experiments and numerical simulation

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Jena, R K ^a,b   Taylor, H K ^a,c,d   Lam, Y C ^a,b   Boning, D S ^a,c   Yue, C Y ^a,b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

^d SINGAPORE MIT ALLIANCE FOR RESEARCH AND TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC BEHAVIORS; BASE POLYMERS; CONFOCAL MICROSCOPES; FLOW DIRECTION; HOT EMBOSSING PROCESS; HOT-EMBOSSING; MATERIAL MODELS; MICRO AND NANOSTRUCTURES; MICRO ELECTRO MECHANICAL SYSTEM; MOLECULAR CHAIN ORIENTATION; NUMERICAL SIMULATION; PATTERN REPLICATION; POLYMER CHAIN ORIENTATION; POLYMER SUBSTRATE; WHITE LIGHT;

ANISOTROPY; COMPUTER SIMULATION; INJECTION MOLDING; MEMS; MICROCHANNELS; MOLECULAR ORIENTATION; SHEET MOLDING COMPOUNDS; SUBSTRATES;

POLYMERS;

EID: 79957964422     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065007     Document Type: Article

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