Sub-μm structured lotus surfaces manufacturing

Microsystem Technologies

Volumn 15, Issue 8, 2009, Pages 1327-1333

  Worgull, Matthias ^a   Heckele, M ^a   Mappes, T ^b   Matthis, B ^a   Tosello, G ^c   Metz, T ^d   Gavillet, J ^e   Koltay, P ^d   Hansen, H N ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KARLSRUHE   (Germany)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^d UNIVERSITY OF FREIBURG   (Germany)

^e DIF   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FEATURE SIZES; FUNCTIONAL LAYER; HIGH ASPECT RATIO; MOLD INSERTS; PROCESS CHAIN; STOCHASTIC METHODS; STRUCTURED SURFACES;

ASPECT RATIO; FLUIDICS; PHOTORESISTS;

POLYMER FILMS;

EID: 67649207422     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0744-7     Document Type: Conference Paper

References (7)

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3. M Heckele WK Schomburg 2004 Review on micro molding of thermoplastic polymers J Micromech Microeng 14 R1 R14 10.1088/0960-1317/14/3/R01
4. RE Johnson RH Dettre 1964 Contact angle hysteresis. I. Study of an idealized rough surface Adv Chem Ser 43 112
5. M Miwa 2000 Effects of the surface roughness on sliding angles of water droplets on superhydrophobic surfaces Langmuir 16 13 5754 5760 10.1021/la991660o
6. J Tsibouklis 2000 Poly(perfluoroalkyl methacrylate) film structures: surface organization phenomena, surface energy determinations, and force of adhesion measurements Macromolecules 33 22 8460 8465 10.1021/ma0008185
7. Worgull M, Hetu J-F, Kabanemi KK, Heckele M (2006) Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication. J Microlith Microfab Microsyst 5(1)