Roll-to-roll pilot nanoimprinting process for backlight devices

Microelectronic Engineering

Volumn 97, Issue , 2012, Pages 89-91

  Mäkelä, Tapio ^a   Haatainen, Tomi ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Backlight; Hot embossing; Nanoimprinting; PMMA; Roll to roll

Indexed keywords

BACKLIGHT; HOT-EMBOSSING; NANO-IMPRINTING; PMMA; ROLL TO ROLL;

ATOMIC FORCE MICROSCOPY; CONFOCAL MICROSCOPY; DISPLAY DEVICES; ESTERS; LUMINESCENCE; NANOIMPRINT LITHOGRAPHY; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; POLYMER FILMS;

LIGHT EMITTING DIODES;

EID: 84865500682     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.03.031     Document Type: Article

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