Replication of microlens arrays by gas-assisted hot embossing

Materials and Manufacturing Processes

Volumn 23, Issue 3, 2008, Pages 261-268

  Hocheng, H ^a   Wen, T T ^a   Yang, S Y ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Electroforming; Gas assisted; Hot embossing; Imprint ithography; LIGA; Microlens array; Reflow; Replication; Uniform pressure; Uniformity

Indexed keywords

ELECTROFORMING; MOLDING; PRESSURE EFFECTS; THERMAL EFFECTS;

HOT EMBOSSING; IMPRINT ITHOGRAPHY; MICROLENS ARRAY; UNIFORM PRESSURE;

MICROLENSES;

EID: 41649101904     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910701860830     Document Type: Article

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