Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2149-2153

  Unno, Noriyuki ^a,b   Taniguchi, Jun ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

EBL; Metal oxide release layer; Metal patterning; Plastic substrate; Roll nanoimprint

Indexed keywords

EBL; METAL OXIDES; METAL PATTERNING; NANO-IMPRINT; PLASTIC SUBSTRATE;

ELECTRON BEAMS; FABRICATION; METALLIC COMPOUNDS; MOLDS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SUBSTRATES;

METALS;

EID: 79960056116     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.006     Document Type: Conference Paper

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