Effect of conventional EDM parameters on the micromachined surface roughness and fabrication of a hot embossing master microtool

Materials and Manufacturing Processes

Volumn 24, Issue 4, 2009, Pages 454-458

  Ali, Mohammad Yeakub ^a   Mohammad, Ammar Sami ^a  

^a INTERNATIONAL ISLAMIC UNIVERSITY MALAYSIA   (Malaysia)

Author keywords

Design of experiment; Discharge current; EDM; Hot embossing microtool; MEMS; Micro hot embossing; Micro EDM; Microfabrication; Micromachining; Microreplication; Miniaturization; Modeling of surface roughness; Pulse off time; Pulse on time; Surface characterization

Indexed keywords

BERYLLIUM; COMPOSITE MICROMECHANICS; DESIGN OF EXPERIMENTS; ELECTRIC DIPOLE MOMENTS; ELECTRIC DISCHARGE MACHINING; GRINDING (COMMINUTION); LIGHTNING; MEMS; METAL ANALYSIS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MICROSTRUCTURE; MINIATURE INSTRUMENTS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; TOOLS;

DISCHARGE CURRENT; EDM; HOT EMBOSSING MICROTOOL; MICRO HOT EMBOSSING; MICRO-EDM; MICROREPLICATION; MINIATURIZATION; MODELING OF SURFACE ROUGHNESS; PULSE-OFF TIME; PULSE-ON TIME; SURFACE CHARACTERIZATION;

SURFACE ANALYSIS;

EID: 61449130599     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910802714373     Document Type: Article

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