메뉴 건너뛰기




Volumn 15, Issue 19, 2007, Pages 12088-12094

Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist

Author keywords

[No Author keywords available]

Indexed keywords

EXTRUSION; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; POLYCARBONATES; POLYMER FILMS; SURFACE TENSION;

EID: 34648825543     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.012088     Document Type: Article
Times cited : (61)

References (12)
  • 1
    • 0025471413 scopus 로고
    • The manufacture of microlenses by melting photoresist
    • D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, "The manufacture of microlenses by melting photoresist," Meas. Sci. Technol. 1, 759-766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
    • (1990) Meas. Sci. Technol , vol.1 , pp. 759-766
    • Daly, D.1    Stevens, R.F.2    Hutley, M.C.3    Davies, N.4
  • 2
    • 0037528553 scopus 로고    scopus 로고
    • Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask
    • X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask," Opt. Express 10, 303-308 (2002).
    • (2002) Opt. Express , vol.10 , pp. 303-308
    • Yuan, X.-C.1    Yu, W.X.2    Ngo, N.Q.3    Cheong, W.C.4
  • 3
    • 2942711517 scopus 로고    scopus 로고
    • UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask
    • W. X. Yu, and X. -C. Yuan, "UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask," Opt. Express 11, 2253-2258 (2003).
    • (2003) Opt. Express , vol.11 , pp. 2253-2258
    • Yu, W.X.1    Yuan, X.-C.2
  • 4
    • 33745435040 scopus 로고    scopus 로고
    • Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer
    • C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, "Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer," Opt. Express 14, 6253-6258 (2006).
    • (2006) Opt. Express , vol.14 , pp. 6253-6258
    • Chang, C.Y.1    Yang, S.Y.2    Huang, L.S.3    Hsieh, K.H.4
  • 6
    • 34249663873 scopus 로고    scopus 로고
    • Fabrication of a close-packed hemispherical submicron lens array and its application, in photolithography
    • W. L. Chang, and P. K. Wei, "Fabrication of a close-packed hemispherical submicron lens array and its application, in photolithography, " Opt. Express 15, 6774-6783 (2007).
    • (2007) Opt. Express , vol.15 , pp. 6774-6783
    • Chang, W.L.1    Wei, P.K.2
  • 7
    • 11244283329 scopus 로고    scopus 로고
    • Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method
    • S.-I. Chang, and J.-B. Yoon, "Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method," Opt. Express 12, 6366-6371 (2004).
    • (2004) Opt. Express , vol.12 , pp. 6366-6371
    • Chang, S.-I.1    Yoon, J.-B.2
  • 8
    • 31144452834 scopus 로고    scopus 로고
    • Micro lens fabrication by means of femtosecond two photon photopolymerization
    • R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, "Micro lens fabrication by means of femtosecond two photon photopolymerization," Opt. Express 14, 810-816 (2006).
    • (2006) Opt. Express , vol.14 , pp. 810-816
    • Guo, R.1    Xiao, S.2    Zhai, X.3    Li, J.4    Xia, A.5    Huang, W.6
  • 9
    • 10044228644 scopus 로고    scopus 로고
    • Replication of microlens arrays by injection molding
    • B.K. Lee, D.S. Kim and T.H. Kwon, "Replication of microlens arrays by injection molding, Microsystem Technologies," 10, 531-535 (2004).
    • (2004) Microsystem Technologies , vol.10 , pp. 531-535
    • Lee, B.K.1    Kim, D.S.2    Kwon, T.H.3
  • 10
    • 0036532387 scopus 로고    scopus 로고
    • Microlens array produced using hot embossing process
    • N. S. Ong, Y. H. Koh and Y. Q. Fu, "Microlens array produced using hot embossing process," Microelectron. Eng. 60, (2002) 365-379.
    • (2002) Microelectron. Eng , vol.60 , pp. 365-379
    • Ong, N.S.1    Koh, Y.H.2    Fu, Y.Q.3
  • 11
    • 0242380264 scopus 로고    scopus 로고
    • Replication qualities and optical properties of UV-moulded microlens arrays
    • S.-M. Kim and S. Kang, "Replication qualities and optical properties of UV-moulded microlens arrays," J. Phys. D: Appl. Phys. 36, 2451-2456 (2003).
    • (2003) J. Phys. D: Appl. Phys , vol.36 , pp. 2451-2456
    • Kim, S.-M.1    Kang, S.2
  • 12
    • 33744538256 scopus 로고    scopus 로고
    • A roller embossing process for rapid fabrication of microlens arrays on glass substrates
    • C. Y. Chang, S.Y. Yang, and J. L. Sheh, "A roller embossing process for rapid fabrication of microlens arrays on glass substrates," Microsyst. Technol. 12 754-759 (2006).
    • (2006) Microsyst. Technol , vol.12 , pp. 754-759
    • Chang, C.Y.1    Yang, S.Y.2    Sheh, J.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.