Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 615-618

  Huang, Tzu Chien ^a   Wu, Jing Tang ^a   Yang, Sen Yeu ^a   Huang, Po Hsun ^a   Chang, Shuo Hung ^a,b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Dip coating; Electroless nickel plating; Microstructures; Stepped rotating lithography

Indexed keywords

AVERAGE HEIGHTS; CONTINUOUS PROCESS; CURVED SURFACES; DIP COATING; ELECTROLESS NICKEL PLATING; MASS PRODUCTIONS; MICRO-GROOVES; STEPPED ROTATING LITHOGRAPHY;

FABRICATION; MICROSTRUCTURE; NICKEL; NICKEL ALLOYS; NICKEL PLATING; ROLLERS (MACHINE COMPONENTS); ROTATION;

LITHOGRAPHY;

EID: 67349163246     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.008     Document Type: Article

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