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Volumn 87, Issue 4, 1999, Pages 537-570

Nanoscale CMOS

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; INTEGRATED CIRCUIT MANUFACTURE; LOGIC DEVICES; MICROELECTRONICS; MOSFET DEVICES; NANOTECHNOLOGY; VLSI CIRCUITS;

EID: 0033115380     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.752515     Document Type: Article
Times cited : (413)

References (184)
  • 3
    • 0031121270 scopus 로고    scopus 로고
    • S. Asai and Y. Wada, "Technology challenges for integration near and below 0.1 //m," Proc. IEEE, vol. 85, p. 505, Apr. 1997.
    • (1997) Proc. IEEE , vol.85 , pp. 505
    • Asai, S.1    Wada, Y.2
  • 4
    • 0016116644 scopus 로고
    • "Design of ion-implanted MOSFET's with very small physical dimensions," IEEE J
    • R. Dennard et al., "Design of ion-implanted MOSFET's with very small physical dimensions," IEEE J. Solid-Slate Circuits, vol. SC-9, p. 256, 1974.
    • (1974) Solid-Slate Circuits, Vol. SC , pp. 256
    • Dennard, R.1
  • 8
    • 0026852069 scopus 로고
    • W.-H. Chang, B. Davari, M. R. Wordeman, Y. Taur, C. C.-H. Hsu, and M. D. Rodriguez, "A high-performance 0.25-μm CMOS technology-I: Design and characterization," IEEE Trans. Electron Devices, vol. 39, p. 959, Apr. 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , pp. 959
    • Chang, W.-H.1
  • 9
    • 0026852625 scopus 로고
    • B. Davari, W.-H. Chang, K. E. Petrillo, C. Y. Wong, D. Moy, Y. Taur, M. R. Wordeman, J. Y. C. Sun, and C. C.-H. Hsu, "A high-performance 0.25-/m CMOS technology-II: Technology," IEEE Trans. Electron Devices, vol. 39, p. 967, Apr. 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , pp. 967
    • Davari, B.1
  • 10
    • 0023548196 scopus 로고    scopus 로고
    • "Experimental technology and characterization of self-aligned 0.1 fim, gate-length low-temperature operation NMOS devices," in Proc
    • G. Sai-Halasz et al., "Experimental technology and characterization of self-aligned 0.1 fim, gate-length low-temperature operation NMOS devices," in Proc. Int. Electron Devices Meetins, 1987, p. 397.
    • Int. Electron Devices Meetins , vol.397
    • Sai-Halasz, G.1
  • 11
    • 84866212857 scopus 로고    scopus 로고
    • "High transconductance 0.1 /im pMOSFET," in Proc
    • Y. Taur et al., "High transconductance 0.1 /im pMOSFET," in Proc. Int. Electron Devices Meeting, 1992, pp. 901-904.
    • Int. Electron Devices Meeting , vol.1992
    • Taur Et Al, Y.1
  • 12
    • 0027879328 scopus 로고    scopus 로고
    • "High performance 0.1 /im, CMOS devices with 1.5 V power supply," in Proc
    • Y. Taur et al., "High performance 0.1 /im, CMOS devices with 1.5 V power supply," in Proc. Int. Electron Devices Meeting, 1993, pp. 127-130.
    • Int. Electron Devices Meeting , vol.1993
    • Taur Et Al, Y.1
  • 15
    • 33747667461 scopus 로고    scopus 로고
    • "High-performance 0.1 μm room temperature Si MOSFET's," in Proc
    • R. Yan et al., "High-performance 0.1 μm room temperature Si MOSFET's," in Proc. Symp. VLSI Technology, 1992, p. 86.
    • Symp. VLSI Technology , vol.86
    • Yan Et Al, R.1
  • 16
    • 85033822923 scopus 로고
    • Y. Mil etal., "High performance 0.1 μm nMOSFET's with 10 ps/stage delay (85 K) at 1.5 V power supply," in Proc. Symp. VLSI Technology, 1993, pp. 91-92.
    • (1993) Etal., "High Performance , vol.1 , pp. 10
    • Mil, Y.1
  • 18
    • 0028578426 scopus 로고    scopus 로고
    • "An ultra-low power 0.1 μm CMOS," in Proc
    • Y. Mii et al., "An ultra-low power 0.1 μm CMOS," in Proc. Symp. VLSI Technology, 1994, pp. 9-10.
    • Symp. VLSI Technology , vol.910
    • Mii Et Al, Y.1
  • 20
    • 0029713063 scopus 로고    scopus 로고
    • "A high performance 0.08 μm CMOS," in Proc
    • L. Su et al., "A high performance 0.08 μm CMOS," in Proc. Symp. VLSI Technology, 1996, p. 12.
    • Symp. VLSI Technology , vol.12
    • Su, L.1
  • 21
    • 0031353832 scopus 로고    scopus 로고
    • C. Wann et al., "High-performance 0.07 μm CMOS with 9.5 ps gate delay and 150 GHz fr," IEEE Electron Device Lett., vol. 18, p. 625, Dec. 1997.
    • (1997) "High-performance , vol.7 , pp. 625
    • Wann Et Al, C.1
  • 22
  • 23
    • 84886447983 scopus 로고    scopus 로고
    • "Low leakage, ultra-thin, gate oxides for extremely high performance sub-100 nm nMOS-FET's," in Proc
    • G. Timp et al., "Low leakage, ultra-thin, gate oxides for extremely high performance sub-100 nm nMOS-FET's," in Proc. Int. Electron Devices Meeting, 1997, p. 930.
    • Int. Electron Devices Meeting , vol.930
    • Timp Et Al, G.1
  • 27
    • 84886448151 scopus 로고    scopus 로고
    • "Full copper wiring in a sub-0.25 μm CMOS ULSI technology," in Proc
    • D. Edelstem et al., "Full copper wiring in a sub-0.25 μm CMOS ULSI technology," in Proc. Int. Electron Devices Meeting, 1997, p. 773.
    • Int. Electron Devices Meeting , vol.773
    • Edelstem, D.1
  • 28
    • 84886447980 scopus 로고    scopus 로고
    • "Damascene integration of copper and ultralow-k xerogel for high performance interconnects," in Proc
    • Zielinski et al., "Damascene integration of copper and ultralow-k xerogel for high performance interconnects," in Proc. Int. Electron Devices Meeting, 1997, p. 936.
    • Int. Electron Devices Meeting , vol.936
    • Al, Z.E.1
  • 30
    • 0029207481 scopus 로고
    • G. Sai-Halasz, "Performance trends in high-end processors," Proc. IEEE, vol. 83, p. 20, Jan. 1995.
    • (1995) Proc. IEEE , vol.83 , pp. 20
    • Sai-Halasz, G.1
  • 31
    • 33747528701 scopus 로고
    • R. Dennard, "Field effect transistor memory," U.S. Patent 3387286, July 14, 1968.
    • (1968) , vol.3387 , pp. 14
    • Dennard, R.1
  • 34
  • 35
    • 0000730037 scopus 로고    scopus 로고
    • F. Rana, S. Tivvari, and D. Buchanan, "Self-consistent modeling of accumulation layers and tunneling currents through very thin oxides," Appl. Pliys. Lett., vol. 69, no. 8, p. 1104, 1996.
    • (1996) Appl. Pliys. Lett. , vol.69 , Issue.8 , pp. 1104
    • Rana, F.1    Tivvari, S.2    Buchanan, D.3
  • 46
  • 47
    • 0016538539 scopus 로고
    • R. W. Keyes, "Effect of randomness in the distribution of impurity ions on FET thresholds in integrated electronics," IEEEJ. Solid-State Circuits, vol. SC-10, p. 245, 1975.
    • (1975) IEEEJ. Solid-State Circuits, Vol. SC , vol.10 , pp. 245
    • Keyes, R.W.1
  • 48
    • 0027813761 scopus 로고    scopus 로고
    • H.-S. Wong and Y. Taur, "Three-dimensional 'atomistic' simulation of discrete microscopic random dopant distributions effects in sub-0.1 μm MOSFET's," in Proc. Int. Electron Devices Meeting, 1993, pp. 705-708.
    • Proc. Int. Electron Devices Meeting , vol.1993
    • Wong, H.-S.1    Taur, Y.2
  • 50
    • 0029714801 scopus 로고    scopus 로고
    • V. De, X. Tang, and J. Meindl, "Random MOSFET parameter fluctuation limits to gisascale integration (GSI)," in Proc. VLSI Symp., 1996, p. 198.
    • Proc. VLSI Symp. , vol.198
    • De V1    Tang, X.2    Meindl, J.3
  • 51
    • 0029419181 scopus 로고
    • D. Bumett and S.-W. Sun, "Statistical threshold-voltage variation and its impact on supply-voltage scaling," Proc. SPIE, vol. 2636, p. 83, 1995.
    • (1995) Proc. SPIE , vol.2636 , pp. 83
    • Bumett, D.1    Sun, S.-W.2
  • 52
    • 0032157146 scopus 로고    scopus 로고
    • H.-S. P. Wong, Y. Taur, and D. Frank, "Discrete random dopant distribution effects in nanometer-scale MOSFET's," Microelectronic Reliability, vol. 38, no. 9, pp. 1447-1456, 1998.
    • (1998) Microelectronic Reliability , vol.38 , Issue.9 , pp. 1447-1456
    • Wong, H.-S.P.1    Taur, Y.2    Frank, D.3
  • 53
    • 0029293575 scopus 로고
    • A. P. Chandrakasan and R. W. Brodersen, "Minimizing power consumption in digital CMOS circuits," Proc. IEEE, vol. 83, pp. 498-523, 1995.
    • (1995) Proc. IEEE , vol.83 , pp. 498-523
    • Chandrakasan, A.P.1    Brodersen, R.W.2
  • 54
    • 0029292281 scopus 로고
    • D. Singh, J. M. Rabaey, M. Pedram, S. R. F. Catthoor, N. Sehgal, and T. J. Mozdzen, "Power conscious CAD tools and methodologies: A perspective," Proc. IEEE, vol. 83, pp. 570-593, 1995.
    • (1995) Proc. IEEE , vol.83 , pp. 570-593
    • Singh, D.1
  • 55
    • 85051846779 scopus 로고    scopus 로고
    • C. Piguet, "Circuit and logic level design," in Z-oii1 Power Design in Deep Submicron Electronics, vol. 337, W. Nebel and J. Mermet, Eds. Dordrecht, The Netherlands: Kluwer, 1997, pp. 105-134.
    • Power Design in Deep Submicron Electronics , vol.337 , pp. 105-134
    • Piguet, C.1
  • 60
    • 0030712625 scopus 로고    scopus 로고
    • D. J. Frank, P. Solomon, S. Reynolds, and J. Shin, "Supply and threshold voltage optimization for low power design," in Proc. 1997 Int. Symp. Low Power Electronics and Design, 1997, pp. 317-322.
    • Proc. , vol.1997 , pp. 317-322
    • Frank, D.J.1    Solomon, P.2    Reynolds, S.3    Shin, J.4
  • 64
    • 0029358972 scopus 로고
    • S.-W. Sun and P. G. Y. Tsui, "Limitation of CMOS supplyvoltage scaling by MOSFET threshold-voltage variation," IEEE J. Solid-State Circuits, vol. 30, pp. 947-949, 1995.
    • (1995) IEEE J. Solid-State Circuits , vol.30 , pp. 947-949
    • Sun, S.-W.1    Tsui, P.G.Y.2
  • 66
    • 0029292398 scopus 로고
    • J. Meindl, "Low power microelectronics-Retrospect and prospect," Proc. IEEE, vol. 83, p. 619, Apr. 1995.
    • (1995) Proc. IEEE , vol.83 , pp. 619
    • Meindl, J.1
  • 72
    • 36549093185 scopus 로고
    • A. Ogura and Y. Fujimoto, "Novel technique for Si epitaxial later overgrowth: Tunnel epitaxy," Appl. Phys. Lett., vol. 56, p. 2205, 1989.
    • (1989) Appl. Phys. Lett. , vol.56 , pp. 2205
    • Ogura, A.1    Fujimoto, Y.2
  • 73
    • 0001387171 scopus 로고
    • "Extremely thin and defect-free Si-on-insulator fabrication by tunnel epitaxy," Appl. Phys. Lett., vol. 57, no. 26, p. 2806, 1990.
    • (1990) Appl. Phys. Lett. , vol.57 , Issue.2 , pp. 6
    • Thin, E.1
  • 75
    • 0027578622 scopus 로고
    • insulator fabrication by advanced epitaxial lateral overgrowth: Tunnel epitaxy," J. Electrochemical Soc., vol. 140, no. 4, p. 1125, 1993.
    • (1993) J. Electrochemical Soc. , vol.140 , Issue.4 , pp. 1125
  • 95
    • 33747551802 scopus 로고
    • S. Biesemans, S. Kubicek, and K. D. Meyer, "Analytical calculations of a figure of merit for novel MOSFET architecture's for the sub 0.25 μm range," NUPAD, p. 11, 1994. [96] C. Fiegna, H. Iwai, T. Wada, M. Saito, E. Sangiorgi, and B. Ricco, "Scaling the MOS transistor below 0.1 //m: Methodology, device structures, and technology requirements," IEEE Trans. Electron Devices, vol. 41, p. 941, 1994. [97] C. Wann, F. Assaderaghi, R. Dennard, C. Hu, G. Shahidi, and Y. Taur, "Channel profile optimization and device design for low-power high-performance dynamic-threshold MOSFET," in Proc. Int. Electron Devices Meeting, 1996, p. 113.
    • (1994) NUPAD, P. , vol.11 , pp. 41-941
    • Biesemans, S.1    Kubicek, S.2    Meyer, K.D.3
  • 120
    • 0031097651 scopus 로고    scopus 로고
    • Y. Omura, "Features of ultimately miniaturized MOSFET's/SOI: A new stage in device physics and design concepts," IEICE Trans. Electron., vol. E80-C, p. 394, 1997.
    • (1997) IEICE Trans. Electron., Vol. e , vol.80 , pp. 394
    • Omura, Y.1
  • 123
    • 0030283640 scopus 로고    scopus 로고
    • J. Denton and G. Neudeck, "Fully depleted dual-gated thin-film SOI p-MOSFET's fabricated in SOI islands with an isolated polysilicon backgate," IEEE Electron Device Lett., vol. 17, p. 509. 1996.
    • (1996) IEEE Electron Device Lett. , vol.17 , pp. 509
    • Denton, J.1    Neudeck, G.2
  • 126
    • 0031079417 scopus 로고    scopus 로고
    • C. Auth, "Scaling theory for cylindrical fully-depleted, surrounding-gate MOSFET's," IEEE Electron Device Lett., vol. 18, p. 74, 1997.
    • (1997) IEEE Electron Device Lett. , vol.18 , pp. 74
    • Auth, C.1
  • 129
    • 0001002541 scopus 로고    scopus 로고
    • E. Leobandung, J. Gu, L. Guo, and S. Chou, "Wire-channel and wrap-around-gate metal-oxide-semconductor field-effect transistors with significant reduction in short-channel effects," J. Vacation Sci. Technol., vol. B-15, p. 2791, 1997.
    • (1997) J. Vacation Sci. Technol., Vol. B , vol.15 , pp. 2791
    • Leobandung, E.1    Gu, J.2    Guo, L.3    Chou, S.4
  • 134
    • 0029207481 scopus 로고
    • G. Sai-Halas, "Performance trends in high end processors," Proc. IEEE, vol. 83, p. 20, Jan. 1995.
    • (1995) Proc. IEEE , vol.83 , pp. 20
    • Sai-Halas, G.1
  • 135
    • 0029291056 scopus 로고
    • K. Jenkins and J. Sun, "Measurement of I-V curves of silicon on insulator (SOI) MOSFETs without self heating," IEEE Electron Device Lett., vol. 16, p. 145, 1995.
    • (1995) IEEE Electron Device Lett. , vol.16 , pp. 145
    • Jenkins, K.1    Sun, J.2
  • 137
    • 0031077575 scopus 로고    scopus 로고
    • L. Guo, E. Leobandung, and S. Chou, "A room-temperature silicon single-electron metal-oxide-semiconductor memory with nanoscale floating-gate and Ultranarrow channel," Appl. Phys. Lett., vol. 70, no. 7, p. 850, 1997.
    • (1997) Appl. Phys. Lett. , vol.70 , Issue.7 , pp. 850
    • Guo, L.1    Leobandung, E.2    Chou, S.3
  • 150
    • 0029404681 scopus 로고
    • B. Furht, "A survey of multimedia compression techniques and standards-Part II: Video compression," Real-Time Imaging, vol. 1, pp. 319-337, 1995.
    • (1995) Real-Time Imaging , vol.1 , pp. 319-337
    • Furht, B.1
  • 153
    • 0003291192 scopus 로고
    • A. K. Lenstra and H. W. L., Jr., "The development of the number field sieve," in Lecture Notes in Math, vol. 1554. Berlin, Germany: Springer-Verlag, 1993.
    • (1993) Lecture Notes in Math , vol.1554
    • Lenstra, A.K.1
  • 156
    • 0028733870 scopus 로고
    • "A 20 GHz 8 bit multiplexer 1C implemented with 0.5 /mi wnx/w-gate GAAS MESFET," IEEEJ
    • T. Seshita et al., "A 20 GHz 8 bit multiplexer 1C implemented with 0.5 /mi wnx/w-gate GAAS MESFET," IEEEJ. Solid State Circuits, vol. 29, pp. 1583-1588, Dec. 1994.
    • (1994) Solid State Circuits , vol.29 , pp. 1583-1588
    • Seshita Et Al, T.1
  • 159
    • 0002546129 scopus 로고
    • E. R. Possum, "Active pixel sensors: Are CCD dinosaurs?," Proc. SPIE, vol. 1900, p. 2, 1993.
    • (1993) Proc. SPIE , vol.1900 , pp. 2
    • Possum, E.R.1
  • 162
    • 0030378204 scopus 로고    scopus 로고
    • H.-S. Wong, "Technology and device scaling considerations for CMOS imagers," IEEE Trans. Electron Devices, vol. 17, pp. 2131-2142, Dec. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.17 , pp. 2131-2142
    • Wong, H.-S.1
  • 170
    • 0024087662 scopus 로고
    • C. Sah, "Evolution of the MOS transistor-From conception to VLSI," Proc. IEEE, pp. 1280-1326, 1988.
    • (1988) Proc. IEEE, Pp. , vol.1280
    • Sah, C.1
  • 171
    • 0031673833 scopus 로고    scopus 로고
    • R. B. Fair, "History of some early developments in ionimplantation technology leading to silicon transistor manufacturing," Proc. IEEE, vol. 86, p. Ill, Jan. 1998.
    • (1998) Proc. IEEE , vol.86
    • Fair, R.B.1
  • 172
    • 0031672575 scopus 로고    scopus 로고
    • P. Bondy, "Moore's law governs the silicon revolution," Proc. IEEE, vol. 86, p. 78, Jan. 1998.
    • (1998) Proc. IEEE , vol.86 , pp. 78
    • Bondy, P.1
  • 183
    • 33747546465 scopus 로고
    • Hon-Sum Philip Wong (Senior Member, IEEE) received the B.Sc. (Hon.) degree from University of Hong Kong, Hong Kong, in 1982 and the Ph.D. degree in electrical engineering from Lehigh University, Bethlehem, PA, in 1988. He joined IBM T. J. Watson Research Center, Yorktown Heights, NY, in 1988 as a Research Staff Member. From 1988 to 1992, he worked on the design, fabrication, and characterization of a high-resolution, high color-fidelity CCD image scanner for art work archiving. Since 1993, he has been working on analysis, fabrication, and applications of nanoscale CMOS devices. His recent work included simulations of discrete random dopant fluctuation effects in small MOSFET's, the physics and technology of double-gate and back-gate MOSFET's, CMOS projection displays, and CMOS image sensors. David J. Frank (Member, IEEE) received the B.S. degree from the California Institute of Technology, Pasadena, in 1977 and the Ph.D. degree in physics from Harvard University, Cambridge, MA, in 1983. Since 1983, he has been employed at the IBM T. J. Watson Research Center, Yorktown Heights, NY, where he is a Research Staff Member. His studies have included nonequilibrium superconductivity, modeling and measuring III-V devices, and exploring the limits of scaling of silicon technology. His recent work includes the modeling of innovative silicon devices, analysis of CMOS scaling issues, investigating the usefulness of energy-recovering CMOS logic and reversible computing concepts, and low-power circuit design. His interests include superconductor and semiconductor device physics, modeling and measurement, circuit design, and percolation in two-dimensional systems. Paul M. Solomon (Fellow, IEEE) was born Cape Town, South Africa. He received the B.Sc. degree in electrical engineering from the University of Cape Town, South Africa, in 1968 and the Ph.D. degree from the Technion, Haifa, Israel, in 1974 for work on the breakdown properties of silicon dioxide. Since 1975, he has been a Research Staff Member at the IBM T. J. Watson Research Center, Yorktown Heights, NY. At IBM, his interests have been in the field of high-speed semiconductor devices. He has contributed to the theory of scaling bipolar transistors to very small dimensions and has developed methodologies to compare the performance of high-speed semiconductor devices. The design of high-speed semiconductor logic devices has been a continuing topic, ranging from self-aligned bipolar transistors through novel heterostructure field effect transistors and more recently to novel CMOS device concepts. He has contributed to the physics of transport in semiconductors and has taught the physics of high-speed devices at Stanford University. Dr. Solomon is a member of APS. Clement H. J. Wann received the B.S. degree from National Taiwan University in 1988 and the M.S. and Ph.D. degrees from University of California, Berkeley, in 1992 and 1996, respectively, all in electrical engineering. He joined IBM T. J. Watson Research Center, Yorktown Heights, NY, as a Research Staff Member in 1996. He is currently with IBM Semiconductor Research and Development Center, East Fishkill, NY. Jeffrey J. Welser (Member, IEEE) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1988, 1989, and 1994, respectively. He has held short-term positions at Sumitomo Electric in Japan (1988) and at IBM T. J. Watson Research Center (1989-1990), Yorktown Heights, NY, working on GaAs devices, and a postdoctoral position at Stanford University (1995), where he continued his thesis research on SiGe materials and their applications to MOSFET devices. Since 1995, he has been a Research Staff Member at IBM T. J. Watson Research Center, and his current research activities focus on novel silicon devices, including vertical transistors and nanostructures, for a variety of memory applications.
    • (1988) , vol.1982 , pp. 1988
    • Kong, H.1


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