-
1
-
-
0029292445
-
-
B. Davari, R. H. Dennard, and G. G. Shahidi, "CMOS scaling, the next ten years," froc. IEEE, vol. 83, p. 595, 1995.
-
(1995)
IEEE
, vol.83
, pp. 595
-
-
Davari, B.1
Dennard, R.H.2
Shahidi, G.G.3
-
2
-
-
0031122158
-
-
Y. Taur, D. Buchanan, W. Chen, D. Frank, K. Ismail, S.-H. Lo, G. Sai-Halasz, R. Viswanathan, H.-J. C. Wann, S. Wind, and H.-S. Wona, "CMOS scaling into the nanometer regime," Proc. IEEE, vol. 85, p. 486, Apr. 1997.
-
(1997)
Proc. IEEE
, vol.85
, pp. 486
-
-
Taur, Y.1
Buchanan, D.2
Chen, W.3
Frank, D.4
Ismail, K.5
Lo, S.-H.6
Sai-Halasz, G.7
Viswanathan, R.8
Wann, H.-J.C.9
Wind, S.10
Wona, H.-S.11
-
3
-
-
0031121270
-
-
S. Asai and Y. Wada, "Technology challenges for integration near and below 0.1 //m," Proc. IEEE, vol. 85, p. 505, Apr. 1997.
-
(1997)
Proc. IEEE
, vol.85
, pp. 505
-
-
Asai, S.1
Wada, Y.2
-
4
-
-
0016116644
-
"Design of ion-implanted MOSFET's with very small physical dimensions," IEEE J
-
R. Dennard et al., "Design of ion-implanted MOSFET's with very small physical dimensions," IEEE J. Solid-Slate Circuits, vol. SC-9, p. 256, 1974.
-
(1974)
Solid-Slate Circuits, Vol. SC
, pp. 256
-
-
Dennard, R.1
-
5
-
-
33646917822
-
-
D. J. Frank, "Application and technology forecast," in Low Power Design in Deep Submicron Electronics, vol. 337, W. Nebel and J. Mermet, Eds. Dordrecht, The Netherlands: Kluwer, 1997, pp. 9-44.
-
Low Power Design in Deep Submicron Electronics
, vol.337
, pp. 9-44
-
-
Frank, D.J.1
-
7
-
-
0024177063
-
-
B. Davari, C. Koburger, T. Furukawa, Y. Taur, W. Noble, A. Megdanis, J. Warnock, and J. Mauer, "A variable-size shallow trench isolation (STI) technology with diffused sidewall doping for submicron CMOS," in Proc. Int. Electron Devices Meeting, 1988, p. 92.
-
Proc. Int. Electron Devices Meeting
, vol.92
-
-
Davari, B.1
Koburger, C.2
Furukawa, T.3
Taur, Y.4
Noble, W.5
Megdanis, A.6
Warnock, J.7
Mauer, J.8
-
8
-
-
0026852069
-
-
W.-H. Chang, B. Davari, M. R. Wordeman, Y. Taur, C. C.-H. Hsu, and M. D. Rodriguez, "A high-performance 0.25-μm CMOS technology-I: Design and characterization," IEEE Trans. Electron Devices, vol. 39, p. 959, Apr. 1992.
-
(1992)
IEEE Trans. Electron Devices
, vol.39
, pp. 959
-
-
Chang, W.-H.1
-
9
-
-
0026852625
-
-
B. Davari, W.-H. Chang, K. E. Petrillo, C. Y. Wong, D. Moy, Y. Taur, M. R. Wordeman, J. Y. C. Sun, and C. C.-H. Hsu, "A high-performance 0.25-/m CMOS technology-II: Technology," IEEE Trans. Electron Devices, vol. 39, p. 967, Apr. 1992.
-
(1992)
IEEE Trans. Electron Devices
, vol.39
, pp. 967
-
-
Davari, B.1
-
10
-
-
0023548196
-
"Experimental technology and characterization of self-aligned 0.1 fim, gate-length low-temperature operation NMOS devices," in Proc
-
G. Sai-Halasz et al., "Experimental technology and characterization of self-aligned 0.1 fim, gate-length low-temperature operation NMOS devices," in Proc. Int. Electron Devices Meetins, 1987, p. 397.
-
Int. Electron Devices Meetins
, vol.397
-
-
Sai-Halasz, G.1
-
11
-
-
84866212857
-
"High transconductance 0.1 /im pMOSFET," in Proc
-
Y. Taur et al., "High transconductance 0.1 /im pMOSFET," in Proc. Int. Electron Devices Meeting, 1992, pp. 901-904.
-
Int. Electron Devices Meeting
, vol.1992
-
-
Taur Et Al, Y.1
-
12
-
-
0027879328
-
"High performance 0.1 /im, CMOS devices with 1.5 V power supply," in Proc
-
Y. Taur et al., "High performance 0.1 /im, CMOS devices with 1.5 V power supply," in Proc. Int. Electron Devices Meeting, 1993, pp. 127-130.
-
Int. Electron Devices Meeting
, vol.1993
-
-
Taur Et Al, Y.1
-
13
-
-
0019682190
-
-
S. Ogura, P. Tsang, W. Walker, D. Critchlow, and J. Shepard, "Elimination of hot electron gate current by lightly doped drainsource structure," in Proc. Int. Electron Devices Meeting, 1981, p. 651.
-
Proc. Int. Electron Devices Meeting
, vol.651
-
-
Ogura, S.1
Tsang, P.2
Walker, W.3
Critchlow, D.4
Shepard, J.5
-
14
-
-
0024073264
-
-
G. A. Sai-Halasz, M. R. Wordeman, D. P. Kern, S. Rishton, and E. Ganin, "High transconductance and velocity overshoot in NMOS devices at the 0.1 μm-gate-length level," IEEE Electron Device Lett., vol. EDL-9, p. 464, 1988.
-
(1988)
IEEE Electron Device Lett., Vol. EDL
, vol.9
, pp. 464
-
-
Sai-Halasz, G.A.1
Wordeman, M.R.2
Kern, D.P.3
Rishton, S.4
Ganin, E.5
Transconductance6
-
15
-
-
33747667461
-
"High-performance 0.1 μm room temperature Si MOSFET's," in Proc
-
R. Yan et al., "High-performance 0.1 μm room temperature Si MOSFET's," in Proc. Symp. VLSI Technology, 1992, p. 86.
-
Symp. VLSI Technology
, vol.86
-
-
Yan Et Al, R.1
-
16
-
-
85033822923
-
-
Y. Mil etal., "High performance 0.1 μm nMOSFET's with 10 ps/stage delay (85 K) at 1.5 V power supply," in Proc. Symp. VLSI Technology, 1993, pp. 91-92.
-
(1993)
Etal., "High Performance
, vol.1
, pp. 10
-
-
Mil, Y.1
-
17
-
-
0027878002
-
-
M. Ono, M. Saito, T. Yoshitomi, C. Fiegna, T. Ohguro, and H. Iwai, "Sub-50 nm gate length n-MOSFET's with 10 nm phosphorus source and drain junctions," in Proc. Int. Electron Devices Meeting, 1993, p. 119.
-
Proc. Int. Electron Devices Meeting
, vol.119
-
-
Ono, M.1
Saito, M.2
Yoshitomi, T.3
Fiegna, C.4
Ohguro, T.5
Iwai, H.6
-
18
-
-
0028578426
-
"An ultra-low power 0.1 μm CMOS," in Proc
-
Y. Mii et al., "An ultra-low power 0.1 μm CMOS," in Proc. Symp. VLSI Technology, 1994, pp. 9-10.
-
Symp. VLSI Technology
, vol.910
-
-
Mii Et Al, Y.1
-
19
-
-
0028735535
-
-
H. Momose, M. Ono, T. Yoshitomi, T. Ohguro, S. Nakamura, M. Saito, and H. Iwai, "Tunneling gate oxide approach to ultrahigh current drive in small-geometry MOSFET's," in Proc. Int. Electron Devices Meeting, 1994, p. 593.
-
Proc. Int. Electron Devices Meeting
, vol.593
-
-
Momose, H.1
Ono, M.2
Yoshitomi, T.3
Ohguro, T.4
Nakamura, S.5
Saito, M.6
Iwai, H.7
-
20
-
-
0029713063
-
"A high performance 0.08 μm CMOS," in Proc
-
L. Su et al., "A high performance 0.08 μm CMOS," in Proc. Symp. VLSI Technology, 1996, p. 12.
-
Symp. VLSI Technology
, vol.12
-
-
Su, L.1
-
21
-
-
0031353832
-
-
C. Wann et al., "High-performance 0.07 μm CMOS with 9.5 ps gate delay and 150 GHz fr," IEEE Electron Device Lett., vol. 18, p. 625, Dec. 1997.
-
(1997)
"High-performance
, vol.7
, pp. 625
-
-
Wann Et Al, C.1
-
22
-
-
84886448057
-
"A 7/9/5.5 psec room/low temperature SOI CMOS," in Proc
-
F. Assaderaghi et al., "A 7/9/5.5 psec room/low temperature SOI CMOS," in Proc. Int. Electron Devices Meeting, 1997, p. 415.
-
Int. Electron Devices Meeting
, vol.415
-
-
Assaderaghi Et Al, F.1
-
23
-
-
84886447983
-
"Low leakage, ultra-thin, gate oxides for extremely high performance sub-100 nm nMOS-FET's," in Proc
-
G. Timp et al., "Low leakage, ultra-thin, gate oxides for extremely high performance sub-100 nm nMOS-FET's," in Proc. Int. Electron Devices Meeting, 1997, p. 930.
-
Int. Electron Devices Meeting
, vol.930
-
-
Timp Et Al, G.1
-
26
-
-
33747578063
-
-
C. K. Hu, D. C. Edelstein, C. Uzoh, and T. Sullivan, "Comparison of electromigration in submicron Al(Cu) and Cu thin film lines," in Stress Induced Phenomena in Metalli:ation, AIP Conf. Proc. no. 373, 1996, pp. 153-68.
-
Stress Induced Phenomena in Metalli:ation, AIP Conf. Proc. No.
, vol.373
, pp. 153-68
-
-
Hu, C.K.1
Edelstein, D.C.2
Uzoh, C.3
Sullivan, T.4
-
27
-
-
84886448151
-
"Full copper wiring in a sub-0.25 μm CMOS ULSI technology," in Proc
-
D. Edelstem et al., "Full copper wiring in a sub-0.25 μm CMOS ULSI technology," in Proc. Int. Electron Devices Meeting, 1997, p. 773.
-
Int. Electron Devices Meeting
, vol.773
-
-
Edelstem, D.1
-
28
-
-
84886447980
-
"Damascene integration of copper and ultralow-k xerogel for high performance interconnects," in Proc
-
Zielinski et al., "Damascene integration of copper and ultralow-k xerogel for high performance interconnects," in Proc. Int. Electron Devices Meeting, 1997, p. 936.
-
Int. Electron Devices Meeting
, vol.936
-
-
Al, Z.E.1
-
29
-
-
84886448143
-
-
M. Matsuura, I. Tottori, K. Goto, K. Maekawa, and M. Hirayama, "A highly reliable self-planarizing low-k intermetal dielectric for sub-quarter micron interconnects," in Proc. Int. Electron Devices Meeting, 1997, p. 785.
-
Proc. Int. Electron Devices Meeting
, vol.785
-
-
Matsuura, M.1
Tottori, I.2
Goto, K.3
Maekawa, K.4
Hirayama, M.5
-
30
-
-
0029207481
-
-
G. Sai-Halasz, "Performance trends in high-end processors," Proc. IEEE, vol. 83, p. 20, Jan. 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 20
-
-
Sai-Halasz, G.1
-
31
-
-
33747528701
-
-
R. Dennard, "Field effect transistor memory," U.S. Patent 3387286, July 14, 1968.
-
(1968)
, vol.3387
, pp. 14
-
-
Dennard, R.1
-
34
-
-
0031140867
-
-
S.-H. Lo, D. Buchanan, Y. Taur, and W. Wang, "Quantummechanical modeling of electron tunneling current from the inversion layer of ultra-thin-oxide MOSFETs," IEEE Electron Device Lett., vol. 18, p. 209, May 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.18
, pp. 209
-
-
Lo, S.-H.1
Buchanan, D.2
Taur, Y.3
Wang, W.4
-
35
-
-
0000730037
-
-
F. Rana, S. Tivvari, and D. Buchanan, "Self-consistent modeling of accumulation layers and tunneling currents through very thin oxides," Appl. Pliys. Lett., vol. 69, no. 8, p. 1104, 1996.
-
(1996)
Appl. Pliys. Lett.
, vol.69
, Issue.8
, pp. 1104
-
-
Rana, F.1
Tivvari, S.2
Buchanan, D.3
-
36
-
-
0032307139
-
-
S. Tivvari, J. Welser, D. DiMaria, and F. Rana, "Currents, surface potentials, and defect generation in 1.2-1.5 nm oxide MOSFET's," in Proc. Device Research Conf., 1998, p. 12.
-
Proc. Device Research Conf.
, vol.2
-
-
Tivvari, S.1
Welser, J.2
Dimaria, D.3
Rana, F.4
-
37
-
-
0032187666
-
-
D. Frank, Y. Taur, and H.-S. P. Wong, "Generalized scale length for two-dimensional effects in MOSFET's," IEEE Electron Device Lett., vol. 19, p. 385, Oct. 1998.
-
(1998)
IEEE Electron Device Lett.
, vol.19
, pp. 385
-
-
Frank, D.1
Taur, Y.2
Wong, H.-S.P.3
-
38
-
-
85056911965
-
-
D. Frank, S. Laux, and M, Fischetti, "Monte Carlo simulation of a 30 nm dual-gate MOSFET: How far can Si go?," in Proc. Int. Electron Devices Meeting, 1992, p. 553.
-
Proc. Int. Electron Devices Meeting
, vol.553
-
-
Frank S Laux, D.1
Fischetti, M.2
-
39
-
-
84963965381
-
-
C. Fiegna, H. Iwai, T. Wada, T. Saito, E. Sangiorgi, and B. Ricco, "A new scaling methodology for the 0.1-0.025 /im MOSFET," in Proc. Symp. VLSI Technology, 1992, p. 33.
-
Proc. Symp. VLSI Technology
, vol.33
-
-
Fiegna, C.1
Iwai, H.2
Wada, T.3
Saito, T.4
Sangiorgi, E.5
Ricco, B.6
-
41
-
-
0029208512
-
-
E. Adler, J. DeBrosse, S. Geissler, S. Holmes, M. Jaffe, J. Johnson, C. W. Koburger, III, J. Lasky, B. Lloyd, G. Miles, J. Nakos, W. P. Noble, Jr., S. Voldman, M. Armacost, and R. Ferguson, "The evolution of IBM CMOS DRAM technology," IBM J. Res. Develop., vol. 39, nos. 1/2, p. 167, 1995.
-
(1995)
IBM J. Res. Develop.
, vol.39
, pp. 12-167
-
-
Adler, E.1
Debrosse, J.2
Geissler, S.3
Holmes, S.4
Jaffe, M.5
Johnson, J.6
Koburger, C.W.7
Lasky, J.8
Lloyd, B.9
Miles, G.10
Nakos, J.11
Noble, W.P.12
Voldman, S.13
Armacost, M.14
Ferguson, R.15
-
44
-
-
0029715043
-
-
K. Itoh, Y. Nakagome, S. Kimura, and T. Watanabe, "Limitations and challenges of multi-gigabit DRAM circuits," in Proc. Symp. VLSI Circuits, 1996, p. 2.
-
Proc. Symp. VLSI Circuits
, vol.2
-
-
Itoh, K.1
Nakagome, Y.2
Kimura, S.3
Watanabe, T.4
-
45
-
-
0031212918
-
-
P. Pavan, R. Bez, P. Olivo, and E. Zanoni, "Flash memory cells-An overview," Proc. IEEE, vol. 85, p. 1248, Aug.1997.
-
(1997)
Proc. IEEE
, vol.85
, pp. 1248
-
-
Pavan, P.1
Bez, R.2
Olivo, P.3
Zanoni, E.4
-
47
-
-
0016538539
-
-
R. W. Keyes, "Effect of randomness in the distribution of impurity ions on FET thresholds in integrated electronics," IEEEJ. Solid-State Circuits, vol. SC-10, p. 245, 1975.
-
(1975)
IEEEJ. Solid-State Circuits, Vol. SC
, vol.10
, pp. 245
-
-
Keyes, R.W.1
-
48
-
-
0027813761
-
-
H.-S. Wong and Y. Taur, "Three-dimensional 'atomistic' simulation of discrete microscopic random dopant distributions effects in sub-0.1 μm MOSFET's," in Proc. Int. Electron Devices Meeting, 1993, pp. 705-708.
-
Proc. Int. Electron Devices Meeting
, vol.1993
-
-
Wong, H.-S.1
Taur, Y.2
-
49
-
-
85001841209
-
-
T. Mizuno, J. Okamura, and A. Toriumi, "Experimental study of threshold voltage fluctuations using an 8k MOSFET's array," in Proc. VLSI Symp., 1993, p. 41.
-
Proc. VLSI Symp.
, vol.1993
-
-
Mizuno, T.1
Okamura, J.2
Toriumi, A.3
-
50
-
-
0029714801
-
-
V. De, X. Tang, and J. Meindl, "Random MOSFET parameter fluctuation limits to gisascale integration (GSI)," in Proc. VLSI Symp., 1996, p. 198.
-
Proc. VLSI Symp.
, vol.198
-
-
De V1
Tang, X.2
Meindl, J.3
-
51
-
-
0029419181
-
-
D. Bumett and S.-W. Sun, "Statistical threshold-voltage variation and its impact on supply-voltage scaling," Proc. SPIE, vol. 2636, p. 83, 1995.
-
(1995)
Proc. SPIE
, vol.2636
, pp. 83
-
-
Bumett, D.1
Sun, S.-W.2
-
52
-
-
0032157146
-
-
H.-S. P. Wong, Y. Taur, and D. Frank, "Discrete random dopant distribution effects in nanometer-scale MOSFET's," Microelectronic Reliability, vol. 38, no. 9, pp. 1447-1456, 1998.
-
(1998)
Microelectronic Reliability
, vol.38
, Issue.9
, pp. 1447-1456
-
-
Wong, H.-S.P.1
Taur, Y.2
Frank, D.3
-
53
-
-
0029293575
-
-
A. P. Chandrakasan and R. W. Brodersen, "Minimizing power consumption in digital CMOS circuits," Proc. IEEE, vol. 83, pp. 498-523, 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 498-523
-
-
Chandrakasan, A.P.1
Brodersen, R.W.2
-
54
-
-
0029292281
-
-
D. Singh, J. M. Rabaey, M. Pedram, S. R. F. Catthoor, N. Sehgal, and T. J. Mozdzen, "Power conscious CAD tools and methodologies: A perspective," Proc. IEEE, vol. 83, pp. 570-593, 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 570-593
-
-
Singh, D.1
-
55
-
-
85051846779
-
-
C. Piguet, "Circuit and logic level design," in Z-oii1 Power Design in Deep Submicron Electronics, vol. 337, W. Nebel and J. Mermet, Eds. Dordrecht, The Netherlands: Kluwer, 1997, pp. 105-134.
-
Power Design in Deep Submicron Electronics
, vol.337
, pp. 105-134
-
-
Piguet, C.1
-
56
-
-
33747552147
-
-
C. Svensson and D. Liu, "Low power circuit techniques," in Low Power Design Methodologies, P. M. Rabaey and M. Pedram, Eds. Dordrecht, The Netherlands: Kluwer, 1996.
-
(1996)
Low Power Design Methodologies, P. M. Rabaey and M. Pedram, Eds. Dordrecht, the Netherlands: Kluwer
-
-
Svensson, C.1
Liu, D.2
-
57
-
-
0029290289
-
-
T. H. Meng, B. M. Gordon, E. K. Tsern, and A. C. Hung, "Portable video-on-demand in wireless communication," Proc. IEEE, vol. 83, pp. 359-380, Apr. 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 359-380
-
-
Meng, T.H.1
Gordon, B.M.2
Tsern, E.K.3
Hung, A.C.4
-
58
-
-
0027187367
-
-
Z.-H. Liu, C. Hu, J.-H. Huang, T.-Y. Chan, M.-C. Jeng, P. Ko, and Y. Cheng, "Threshold voltage model for deepsubmicrometer MOSFET's," IEEE Trans. Electron Devices, vol. 40, p. 86, 1993.
-
(1993)
IEEE Trans. Electron Devices
, vol.40
, pp. 86
-
-
Liu, Z.-H.1
Hu, C.2
Huang, J.-H.3
Chan, T.-Y.4
Jeng, M.-C.5
Ko, P.6
Cheng, Y.7
-
59
-
-
0029409439
-
-
H.-S. Chen, C. Teng, J. Zhao, L. Moberly, and R. Lahri, "Analog characteristics of drain engineered submicron MOSFET's for mixed-signal applications," Solid State Electron., p. 1857, 1995.
-
(1995)
Solid State Electron., P.
, vol.1857
-
-
Chen, H.-S.1
Teng, C.2
Zhao, J.3
Moberly, L.4
Lahri, R.5
-
60
-
-
0030712625
-
-
D. J. Frank, P. Solomon, S. Reynolds, and J. Shin, "Supply and threshold voltage optimization for low power design," in Proc. 1997 Int. Symp. Low Power Electronics and Design, 1997, pp. 317-322.
-
Proc.
, vol.1997
, pp. 317-322
-
-
Frank, D.J.1
Solomon, P.2
Reynolds, S.3
Shin, J.4
-
62
-
-
0030412691
-
-
A. J. Bhavnagarwala, V. K. De, B. Austin, and J. D. Meindl, "Circuit techniques for low power CMOS GSI," in 7996 ISLPED Dig. Tech. Papers, pp. 193-196.
-
ISLPED Dig. Tech. Papers, Pp. 193-196.
-
-
Bhavnagarwala, A.J.1
De K, V.2
Austin, B.3
Meindl, J.D.4
-
63
-
-
0028745324
-
-
Z. Chen, J. Shott, J. Burr, and J. D. Plummer, "CMOS technology scaling for low voltage low power applications," in 1994 SLPE Dig. Tech. Papers, pp. 56-57.
-
SLPE Dig. Tech. Papers, Pp. 56-57.
-
-
Chen, Z.1
Shott, J.2
Burr, J.3
Plummer, J.D.4
-
64
-
-
0029358972
-
-
S.-W. Sun and P. G. Y. Tsui, "Limitation of CMOS supplyvoltage scaling by MOSFET threshold-voltage variation," IEEE J. Solid-State Circuits, vol. 30, pp. 947-949, 1995.
-
(1995)
IEEE J. Solid-State Circuits
, vol.30
, pp. 947-949
-
-
Sun, S.-W.1
Tsui, P.G.Y.2
-
66
-
-
0029292398
-
-
J. Meindl, "Low power microelectronics-Retrospect and prospect," Proc. IEEE, vol. 83, p. 619, Apr. 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 619
-
-
Meindl, J.1
-
67
-
-
0031071452
-
-
J. Meindl, V. De, D. Wills, J. Eble, X. Tang, J. Davis, B. Austin, and A. Bhavnagarwala, "The impact of stochastic dopant and interconnect distributions on gigascale integration," in Proc. Int. Solid State Circuits Conf., 1997, p. 232.
-
Proc. Int. Solid State Circuits Conf.
, vol.232
-
-
Meindl, J.1
De V2
Wills, D.3
Eble, J.4
Tang, X.5
Davis, J.6
Austin, B.7
Bhavnagarwala, A.8
-
71
-
-
17144449930
-
-
G. Shahidi, B. Davari, Y. Taur, J. Warnock, M. Wordeman, P. McFarland, S. Mader, M. Rodriguez, R. Assenza, G. Bronner, B. Ginsberg, T. Lii, M. Polcari, and T. Ning, "Fabrication ofCMOS on ultrathin SOI obtained by epitaxial lateral overgrowth and chemical-mechanical polishing," in Proc. Int. Electron Devices Meeting, 1990, p. 587.
-
Proc. Int. Electron Devices Meeting
, vol.587
-
-
Shahidi, G.1
Davari, B.2
Taur, Y.3
Warnock, J.4
Wordeman, M.5
McFarland, P.6
Mader, S.7
Rodriguez, M.8
Assenza, R.9
Bronner, G.10
Ginsberg, B.11
Lii, T.12
Polcari, M.13
Ning, T.14
-
72
-
-
36549093185
-
-
A. Ogura and Y. Fujimoto, "Novel technique for Si epitaxial later overgrowth: Tunnel epitaxy," Appl. Phys. Lett., vol. 56, p. 2205, 1989.
-
(1989)
Appl. Phys. Lett.
, vol.56
, pp. 2205
-
-
Ogura, A.1
Fujimoto, Y.2
-
73
-
-
0001387171
-
-
"Extremely thin and defect-free Si-on-insulator fabrication by tunnel epitaxy," Appl. Phys. Lett., vol. 57, no. 26, p. 2806, 1990.
-
(1990)
Appl. Phys. Lett.
, vol.57
, Issue.2
, pp. 6
-
-
Thin, E.1
-
75
-
-
0027578622
-
-
insulator fabrication by advanced epitaxial lateral overgrowth: Tunnel epitaxy," J. Electrochemical Soc., vol. 140, no. 4, p. 1125, 1993.
-
(1993)
J. Electrochemical Soc.
, vol.140
, Issue.4
, pp. 1125
-
-
-
77
-
-
0027807124
-
-
S. Venkatesan, C. Subramanian, G. Neudeck, and J. Denton, "Thin-film silicon-on-insulator (SOI) device applications of selective epitaxial growth," in Proc. Int. SOI Conf., Palm Springs, CA, 1993, p. 76.
-
Proc. Int. SOI Conf., Palm Springs, CA
, vol.76
-
-
Venkatesan, S.1
Subramanian, C.2
Neudeck, G.3
Denton, J.4
-
78
-
-
0028428245
-
-
J. Siekkinen, G. Neudeck, J. Glenn, and S. Venkatesan, "A novel high-speed silicon bipolar transistor utilizing SEG and CLSEG," IEEE Trans. Electron Devices, p. 862, 1994.
-
(1994)
IEEE Trans. Electron Devices, P.
, vol.862
-
-
Siekkinen, J.1
Neudeck, G.2
Glenn, J.3
Venkatesan, S.4
-
80
-
-
0029713476
-
-
H.-S. Wong, K. Chan, Y. Lee, P. Roper, and Y. Taur, "Ultrathin, highly uniform thin film SOI MOSFET with low series resistance fabricated using pattern-constrained epitaxy (PACE)," in Proc. Symp. VLSI Technology, 1996, p. 94.
-
Proc. Symp. VLSI Technology
, vol.94
-
-
Wong, H.-S.1
Chan, K.2
Lee, Y.3
Roper, P.4
Taur, Y.5
-
81
-
-
0028743284
-
-
G. Shahidi, C. Anderson, B. Chappel, T. Chappel, J. Comfort, B. Davari, R. Dennard, R. Franch, P. McFarland, J. Neely, T. Ning, M. Polcari, and J. Warnock, "A room temperature 0.1 μm CMOS on SOI," IEEE Trans. Electron Devices, vol. 12, p. 2405, 1994.
-
(1994)
IEEE Trans. Electron Devices
, vol.12
, pp. 2405
-
-
Shahidi, G.1
Anderson, C.2
Chappel, B.3
Chappel, T.4
Comfort, J.5
Davari, B.6
Dennard, R.7
Franch, R.8
McFarland, P.9
Neely, J.10
Ning, T.11
Polcari, M.12
Warnock, J.13
Soi, C.O.14
-
83
-
-
0029723460
-
-
W. Chen, Y. Taur, D. Sadana, K. Jenkins, J. Sun, and S. Cohen, "Suppression of the SOI floating-body effects by linked-body device structure," in Proc. Syinp. VLSI Technology, 1996, p. 92.
-
Proc. Syinp. VLSI Technology
, vol.92
-
-
Chen, W.1
Taur, Y.2
Sadana, D.3
Jenkins, K.4
Sun, J.5
Cohen, S.6
-
84
-
-
84886448074
-
-
J. Gautier, M. Pelella, and J. G. Possum, "SOI floating-body, device and circuit issues," in Proc. Int. Electron Devices Meeting, 1997, p. 407.
-
Proc. Int. Electron Devices Meeting
, vol.407
-
-
Gautier, J.1
Pelella, M.2
Possum, J.G.3
-
86
-
-
0029491616
-
-
T. Ohno, M. Takahashi, A. Ohtaka, Y. Sakakibara, and T. Tsuchiya, "Suppression of the parasitic bipolar effect in ultrathin-film nMOSFET's/SIMOX by Ar ion implantation into source/drain regions," in Proc. Int. Electron Devices Meeting, 1995, p. 627.
-
Proc. Int. Electron Devices Meeting
, vol.627
-
-
Ohno, T.1
Takahashi, M.2
Ohtaka, A.3
Sakakibara, Y.4
Tsuchiya, T.5
-
87
-
-
0029512250
-
-
M. Terauchi, M. Yoshimi, A. Murakoshi, and Y. Ushiku, "Suppression of the floating-body effects in SOI MOSFETS by bandeap engineering," in Proc. Syinp. VLSI Technology, 1995, p. 35.
-
Proc. Syinp. VLSI Technology
, vol.35
-
-
Terauchi, M.1
Yoshimi, M.2
Murakoshi, A.3
Ushiku, Y.4
-
88
-
-
84886448134
-
-
D. Schepis, F. Assaderaghi, D. Yee, W. Rausch, R. Bolam, A. Ajmera, E. Leobandung, S. Kulkarni, R. Flaker, D. Sadana, H. Hovel, T. Kebede, C. Schiller, S. Wu, L. Wagner, M. Saccamango, S. Ratanaphanyarat, J. Kuang, M. Hsieh, K. Tallman, R. Martino, D. Fitzpatrick, D. Badami, M. Hakey, S. F. Chu, B. Davari, and G. Shahidi, "A 0.25 μm CMOS SOI technology and its application to 4 Mb SRAM," in Proc. Int. Electron Devices Meeting, 1997, p. 587.
-
Proc. Int. Electron Devices Meeting
, vol.587
-
-
Schepis, D.1
Assaderaghi, F.2
Yee, D.3
Rausch, W.4
Bolam, R.5
Ajmera, A.6
Leobandung, E.7
Kulkarni, S.8
Flaker, R.9
Sadana, D.10
Hovel, H.11
Kebede, T.12
Schiller, C.13
Wu, S.14
Wagner, L.15
Saccamango, M.16
Ratanaphanyarat, S.17
Kuang, J.18
Hsieh, M.19
Tallman, K.20
Martino, R.21
Fitzpatrick, D.22
Badami, D.23
Hakey, M.24
Chu, S.F.25
Davari, B.26
Shahidi, G.27
more..
-
89
-
-
84886448032
-
-
Y.-H. Koh, M.-R. Oh, J.-W. Lee, W.-C. Lee, C.-K. Park, J.-B. Park, Y.-C. Heo, H.-M. Rho, B.-C. Lee, M.-J. Chung, M. H. H.-S. Kim, K.-S. Choi, K.-H. A. W.-C. Lee, K.-W. Park, J.-Y. Yang, H.-K. Kim, D.-H. Lee, and L.-S. Hwang, "1 giga bit SOI DRAM with fully bulk compatible process and body-contacted SOI MOSFET structure," in Proc. Int. Electron Devices Meeting, 1997, p. 579.
-
Proc. Int. Electron Devices Meeting
, vol.579
-
-
Koh, Y.-H.1
Oh, M.-R.2
Lee, J.-W.3
Lee, W.-C.4
Park, C.-K.5
Park, J.-B.6
Heo, Y.-C.7
Rho, H.-M.8
Lee, B.-C.9
Chung, M.-J.10
Kim, M.H.H.-S.11
Choi, K.-S.12
Lee, K.-H.A.W.-C.13
Park, K.-W.14
Yang, J.-Y.15
Kim, H.-K.16
Lee, D.-H.17
Hwang, L.-S.18
-
90
-
-
0041958944
-
-
K. Mistry, G. Grula, J. Sleight, L. Blair, R. Stephany, R. Flatley, and P. Skerry, "A 2.0 V, 0.35 urn partially depleted SOI-CMOS technology," in Proc. Int. Electron Devices Meeting, 1997, p. 583.
-
Urn Partially Depleted SOI-CMOS Technology," in Proc. Int. Electron Devices Meeting
, vol.583
-
-
Mistry, K.1
Grula, G.2
Sleight, J.3
Blair, L.4
Stephany, R.5
Flatley, R.6
Skerry, P.7
-
91
-
-
84886448111
-
-
R. Chau, R. Arghavani, M. Alavi, D. Douglas, J. Greason, R. Green, S. Tyagi, J. Xu, P. Packan, S. Yu, and C. Liang, "Scalability of partially depleted SOI technology for sub-0.25 /im logic applications," in Proc. Int. Electron Devices Meeting, 1997, p. 591.
-
Proc. Int. Electron Devices Meeting
, vol.591
-
-
Chau, R.1
Arghavani, R.2
Alavi, M.3
Douglas, D.4
Greason, J.5
Green, R.6
Tyagi, S.7
Xu, J.8
Packan, P.9
Yu, S.10
Liang, C.11
-
92
-
-
84886448057
-
-
F. Assaderaghi, W. Ruasch, A. Ajmera, E. Leobandung, D. Schepis, L. Wagner, H.-J. Wann, R. Bolam, D. Yee, B. Davari, and G. Shahidi, "A 7.9/5.5 psec room/low temperature SOI CMOS," in Proc. Int. Electron Devices Meeting, 1997, p. 415.
-
Proc. Int. Electron Devices Meeting
, vol.415
-
-
Assaderaghi, F.1
Ruasch, W.2
Ajmera, A.3
Leobandung, E.4
Schepis, D.5
Wagner, L.6
Wann, H.-J.7
Bolam, R.8
Yee, D.9
Davari, B.10
Shahidi, G.11
-
93
-
-
0031353832
-
-
t," IEEE Electron Device Lett., vol. 18, p. 625, Dee. 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.18
, pp. 625
-
-
Wann, C.1
Assaderaghi, F.2
Shi, L.3
Chan, K.4
Cohen, S.5
Hovel, H.6
Jenkins, K.7
Lee, Y.8
Sadana, D.9
Viswanathan, R.10
Wind, S.11
Taur, Y.12
-
94
-
-
0028746226
-
-
L. T. Su, H. Hu, J. B. Jacobs, M. Sherony, A. Wei, and D. A. Antoniadis, "Tradeoffs of current drive versus short-channel effect in deep-submicrometer bulk and SOI MOSFET's," in Proc. Int. Electron Devices Meeting, 1994, p. 649.
-
Proc. Int. Electron Devices Meeting
, vol.649
-
-
Su, L.T.1
Hu, H.2
Jacobs, J.B.3
Sherony, M.4
Wei, A.5
Antoniadis, D.A.6
-
95
-
-
33747551802
-
-
S. Biesemans, S. Kubicek, and K. D. Meyer, "Analytical calculations of a figure of merit for novel MOSFET architecture's for the sub 0.25 μm range," NUPAD, p. 11, 1994. [96] C. Fiegna, H. Iwai, T. Wada, M. Saito, E. Sangiorgi, and B. Ricco, "Scaling the MOS transistor below 0.1 //m: Methodology, device structures, and technology requirements," IEEE Trans. Electron Devices, vol. 41, p. 941, 1994. [97] C. Wann, F. Assaderaghi, R. Dennard, C. Hu, G. Shahidi, and Y. Taur, "Channel profile optimization and device design for low-power high-performance dynamic-threshold MOSFET," in Proc. Int. Electron Devices Meeting, 1996, p. 113.
-
(1994)
NUPAD, P.
, vol.11
, pp. 41-941
-
-
Biesemans, S.1
Kubicek, S.2
Meyer, K.D.3
-
96
-
-
0029491760
-
-
Y. Kado, H. Inokawa, Y. Okazaki, T. Tsuchiya, Y. Kawai, M. Sato, Y. Sakakibara, S. Nakayama, H. Yamada, M. Kitamura, S. Nakashima, K. Nishimura, S. Date, M. Ino, K. Takeya, and T. Sakai, "Substantial advantages of fully-depleted CMOS/SIMOX devices as low-power high-performance VLSI components compared with its bulk-CMOS counterpart," in Proc. Int. Electron Devices Meeting, 1995, p. 635.
-
Proc. Int. Electron Devices Meeting
, vol.635
-
-
Kado, Y.1
Inokawa, H.2
Okazaki, Y.3
Tsuchiya, T.4
Kawai, Y.5
Sato, M.6
Sakakibara, Y.7
Nakayama, S.8
Yamada, H.9
Kitamura, M.10
Nakashima, S.11
Nishimura, K.12
Date, S.13
Ino, M.14
Takeya, K.15
Sakai, T.16
-
97
-
-
0028494572
-
-
L. Su, M. J. Shernoy, H. Hu, J. E. Chung, and D. A. Antoniadis, "Optimization of series resistance in sub-0.2 μm SOI MOSFET's," IEEE Electron Device Letters, vol. 14, p. 363, 1994.
-
(1994)
IEEE Electron Device Letters
, vol.14
, pp. 363
-
-
Su, L.1
Shernoy, M.J.2
Hu, H.3
Chung, J.E.4
Antoniadis, D.A.5
-
98
-
-
0031166784
-
-
M. Cao, T. Kamins, P. V. Voorde, C. Diaz, and W. Greene, "0.18 /im fully-depleted silicon-on-insulator MOSFET's," IEEE Electron Device Lett., vol. 18, p. 251, 1997.
-
(1997)
/Im Fully-depleted Silicon-on-insulator MOSFET's," IEEE Electron Device Lett.
, vol.18
, pp. 251
-
-
Cao, M.1
Kamins, T.2
Voorde, P.V.3
Diaz, C.4
Greene, W.5
-
99
-
-
85032069152
-
-
T. Ando, A. Fowler, and F. Stem, "Electronic properties of two-dimensional systems," Rev. Modern Pliys., vol. 54, p. 437, 1982.
-
(1982)
Rev. Modern Pliys.
, vol.54
, pp. 437
-
-
Ando, T.1
Fowler, A.2
Stem, F.3
-
100
-
-
84886448137
-
-
S.-I. Takagi, J. Koga, and A. Toriumi, "Subband structure engineering for performance enhancement of Si MOSFET's," in Proc. Int. Electron Devices Meeting, 1997, p. 219.
-
Proc. Int. Electron Devices Meeting
, vol.219
-
-
Takagi, S.-I.1
Koga, J.2
Toriumi, A.3
-
101
-
-
0029403828
-
-
J.-H. Choi, Y.-J. Park, and H.-S. Min, "Electron mobility behavior in extremely thin SOI MOSFET's," IEEE Electron Device Lett., vol. 16, p. 527, 1995.
-
(1995)
IEEE Electron Device Lett.
, vol.16
, pp. 527
-
-
Choi, J.-H.1
Park, Y.-J.2
Min, H.-S.3
-
102
-
-
0031143076
-
-
I. Yang, C. Vieri, A. Chandrakasan, and D. Antoniadis, "Backgated CMOS on SOIAS for dynamic threshold voltage control," IEEE Trans. Electron Devices, vol. 44, p. 822, 1997.
-
(1997)
IEEE Trans. Electron Devices
, vol.44
, pp. 822
-
-
Yang, I.1
Vieri, C.2
Chandrakasan, A.3
Antoniadis, D.4
-
104
-
-
0024178927
-
-
S. Takagi, I. Iwase, and A. Toriumi, "On the universality of inversion-layer mobility in n- and p-channel MOSFET's," in Proc. Int. Electron Devices Meeting, 1988, p. 398.
-
Proc. Int. Electron Devices Meeting
, vol.398
-
-
Takagi, S.1
Iwase, I.2
Toriumi, A.3
-
105
-
-
0030173905
-
-
C.-L. Huang, H. Soleimani, G. Grula, N. Arora, and D. Antoniadis, "Isolation process dependence of channel mobility in thin-film SOI devices," IEEE Electron Device Lett., vol. 17, p. 291, 1996.
-
(1996)
IEEE Electron Device Lett.
, vol.17
, pp. 291
-
-
Huang, C.-L.1
Soleimani, H.2
Grula, G.3
Arora, N.4
Antoniadis, D.5
-
106
-
-
84886448026
-
-
S. Tiwari, M. Fischetti, P. Mooney, and J. Welser, "Hole mobility improvement in silicon-on-insulator and bulk silicon transistors using local strain," in Proc. Int. Electron Devices Meeting, 1997, p. 939.
-
Proc. Int. Electron Devices Meeting
, vol.939
-
-
Tiwari, S.1
Fischetti, M.2
Mooney, P.3
Welser, J.4
-
107
-
-
0029482142
-
-
M. Horiuchi, T. Teshima, K. Tokumasu, and K. Yamaguchi, "High-current, small parasitic capacitance MOSFET on a polySi interlayered (PSI) SOI wafer," in Proc. Symp. VLSI Technology, 1995, p. 33.
-
Proc. Symp. VLSI Technology
, vol.33
-
-
Horiuchi, M.1
Teshima, T.2
Tokumasu, K.3
Yamaguchi, K.4
-
108
-
-
0029720155
-
-
T. Kachi, T. Kaga, S. Wakahara, and D. Hisamoto, "Variable threshold-voltage SOI CMOSFET's with implanted back-gate electrodes for power-managed low-power and high-speed sub1-V ulsis," in Proc. Symp. VLSI Technology, 1996, p. 124.
-
Proc. Symp. VLSI Technology
, vol.124
-
-
Kachi, T.1
Kaga, T.2
Wakahara, S.3
Hisamoto, D.4
-
109
-
-
0030271147
-
-
C. Wann, K. Noda, T. Tanaka, M. Yoshida, and C. Hu, , IEEE Trans. Electron Devices, vol. 43, p. 1742, Oct. 1996.
-
(1996)
IEEE Trans. Electron Devices
, vol.43
, pp. 1742
-
-
Wann, C.1
Noda, K.2
Tanaka, T.3
Yoshida, M.4
Hu, C.5
-
111
-
-
84886447996
-
-
H.-S. Wong, K. Chan, and Y. Taur, "Self-aligned (top and bottom) double-gate MOSFET with a 25 nm thick silicon channel," in Proc. Int. Electron Devices Meeting, 1997, p. 427.
-
Proc. Int. Electron Devices Meeting
, vol.427
-
-
Wong, H.-S.1
Chan, K.2
Taur, Y.3
-
112
-
-
0022305765
-
-
S. Nakajima, K. Miura, T. Somatani, and E. Arai, "A trench MOSFET with surface source/drain contacts," in Proc. Int. Electron Devices Meeting, 1985, p. 200.
-
Proc. Int. Electron Devices Meeting
, vol.200
-
-
Nakajima, S.1
Miura, K.2
Somatani, T.3
Arai, E.4
-
113
-
-
0024918341
-
-
D. Hisamoto, T. Kaga, Y. Kamamoto, and E. Takeda, "A fully depleted lean-channel transistor (DELTA)-A novel vertical ultrathin SOI MOSFET," in Proc. Int. Electron Devices Meeting, 1989, p. 833.
-
Proc. Int. Electron Devices Meeting
, vol.833
-
-
Hisamoto, D.1
Kaga, T.2
Kamamoto, Y.3
Takeda, E.4
-
114
-
-
0005319556
-
-
A.-S. Chu, S. H. Zaidi, and S. Brueck, "Fabrication and raman scattering studies of one-dimensional nanometer structures in (110) silicon," Appl. Pliys. Lett., p. 905, 1993.
-
(1993)
Appl. Pliys. Lett., P.
, vol.905
-
-
Chu, A.-S.1
Zaidi, S.H.2
Brueck, S.3
-
115
-
-
0028756972
-
-
H.-S. Wong, D. Frank, Y. Taur, and J. Stork, "Design and performance considerations for sub-0.1 μm double-gate SOI MOSFET's," in Proc. Int. Electron Devices Meeting, 1994, p. 747.
-
Proc. Int. Electron Devices Meeting
, vol.747
-
-
Wong, H.-S.1
Frank, D.2
Taur, Y.3
Stork, J.4
-
117
-
-
0026237465
-
-
T.-J. King, J. R. Pfiester, and K. Saraswat, "A variable-workfunction poIycrystaIline-Si|_JGe.r gate material for submicrometer CMOS technologies," IEEE Electron Device Lett., vol. 12, p. 533, 1993.
-
(1993)
IEEE Electron Device Lett.
, vol.12
, pp. 533
-
-
King, T.-J.1
Pfiester, J.R.2
Saraswat, K.3
-
119
-
-
0027886706
-
-
Y. Omura, S. Horiguchi, M. Tabe, and K. Kishi, "Quantummechanical effects on the threshold voltage of ultrathin-SOI NMOSFET's," IEEE Electron Device Lett., vol. 14, p. 569, 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.14
, pp. 569
-
-
Omura, Y.1
Horiguchi, S.2
Tabe, M.3
Kishi, K.4
-
120
-
-
0031097651
-
-
Y. Omura, "Features of ultimately miniaturized MOSFET's/SOI: A new stage in device physics and design concepts," IEICE Trans. Electron., vol. E80-C, p. 394, 1997.
-
(1997)
IEICE Trans. Electron., Vol. e
, vol.80
, pp. 394
-
-
Omura, Y.1
-
121
-
-
0032284102
-
-
H.-S. Wong, D. Frank, and P. Solomon, "Device design considerations for double-gate, ground-plane, and single-gated ultrathin SOI MOSFET's at the 25 nm channel length generation," in Proc. Int. Electron Devices Meeting, 1998, p. 407.
-
Proc. Int. Electron Devices Meeting
, vol.407
-
-
Wong, H.-S.1
Frank, D.2
Solomon, P.3
-
122
-
-
85177018183
-
-
T. Tanaka, H. Horie, S. Ando, and S. Hijiya, "Analysis of p+ poly Si double-gate thin-film SOI MOSFET's," in Proc. Int. Electron Devices Meeting, 1991, p. 683.
-
Proc. Int. Electron Devices Meeting
, vol.683
-
-
Tanaka, T.1
Horie, H.2
Ando, S.3
Hijiya, S.4
-
123
-
-
0030283640
-
-
J. Denton and G. Neudeck, "Fully depleted dual-gated thin-film SOI p-MOSFET's fabricated in SOI islands with an isolated polysilicon backgate," IEEE Electron Device Lett., vol. 17, p. 509. 1996.
-
(1996)
IEEE Electron Device Lett.
, vol.17
, pp. 509
-
-
Denton, J.1
Neudeck, G.2
-
125
-
-
0029418982
-
-
T. Sugii, T. Tanaka, H. Horie, and K. Suzuki, "15 ps cryogenic operation of 0.19 /mi-/, n+-p+ SOI CMOS," on Proc. SPIE, vol. 2636, 1995, pp. 74-82.
-
Proc. SPIE
, vol.2636
, pp. 74-82
-
-
Sugii, T.1
Tanaka, T.2
Horie, H.3
Suzuki, K.4
-
126
-
-
0031079417
-
-
C. Auth, "Scaling theory for cylindrical fully-depleted, surrounding-gate MOSFET's," IEEE Electron Device Lett., vol. 18, p. 74, 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.18
, pp. 74
-
-
Auth, C.1
-
127
-
-
0025575976
-
-
J. Colinge, M. Gao, A. Romano-Rodriguez, H. Macs, and C. Claeys, "Silicon-on-insulator 'gate-all-around device'," in Proc. Int. Electron Devices Meeting, 1990, p. 595.
-
Proc. Int. Electron Devices Meeting
, vol.595
-
-
Colinge, J.1
Gao, M.2
Romano-Rodriguez, A.3
Macs, H.4
Claeys, C.5
-
129
-
-
0001002541
-
-
E. Leobandung, J. Gu, L. Guo, and S. Chou, "Wire-channel and wrap-around-gate metal-oxide-semconductor field-effect transistors with significant reduction in short-channel effects," J. Vacation Sci. Technol., vol. B-15, p. 2791, 1997.
-
(1997)
J. Vacation Sci. Technol., Vol. B
, vol.15
, pp. 2791
-
-
Leobandung, E.1
Gu, J.2
Guo, L.3
Chou, S.4
-
130
-
-
0026927930
-
-
P. Francis, A. Terao, D. Flandre, and F. V. de Wiele, "Characteristics of nMOS/GAA (gate-all-around) transistors near threshold," Microelectron. Eng., vol. 19, p. 815, 1992.
-
(1992)
Microelectron. Eng.
, vol.19
, pp. 815
-
-
Francis, P.1
Terao, A.2
Flandre, D.3
De Wiele, F.V.4
-
131
-
-
0028753296
-
-
F. Assaderaghi, S. Park, D. Sinitsky, J. Bokor, P.-K. Ko, and C. Hu, "A dynamic threshold voltage MOSFET (DTMOS) for low voltaae operation," IEEE Electron Device Lett., vol. 15, p. 510. 1994.
-
(1994)
IEEE Electron Device Lett.
, vol.15
, pp. 510
-
-
Assaderaghi, F.1
Park, S.2
Sinitsky, D.3
Bokor, J.4
Ko, P.-K.5
Hu, C.6
-
132
-
-
0031162419
-
-
I.-Y. Chung, Y.-J. Park, and H.-S. Min, "A new SOI inverter using dynamic threshold for low-power applications," IEEE Electron Device Lett., vol. 18, p. 248, 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.18
, pp. 248
-
-
Chung, I.-Y.1
Park, Y.-J.2
Min, H.-S.3
-
134
-
-
0029207481
-
-
G. Sai-Halas, "Performance trends in high end processors," Proc. IEEE, vol. 83, p. 20, Jan. 1995.
-
(1995)
Proc. IEEE
, vol.83
, pp. 20
-
-
Sai-Halas, G.1
-
135
-
-
0029291056
-
-
K. Jenkins and J. Sun, "Measurement of I-V curves of silicon on insulator (SOI) MOSFETs without self heating," IEEE Electron Device Lett., vol. 16, p. 145, 1995.
-
(1995)
IEEE Electron Device Lett.
, vol.16
, pp. 145
-
-
Jenkins, K.1
Sun, J.2
-
136
-
-
84944378006
-
-
L. Su, J. Chung, A. Antoniadis, K. Goodson, and M. Flik, "Measurement and modeling of self heating in SOI nMOSFET's," IEEE Trans. Electron Devices, vol. 41, p. 69, 1994.
-
(1994)
IEEE Trans. Electron Devices
, vol.41
, pp. 69
-
-
Su, L.1
Chung, J.2
Antoniadis, A.3
Goodson, K.4
Flik, M.5
-
137
-
-
0031077575
-
-
L. Guo, E. Leobandung, and S. Chou, "A room-temperature silicon single-electron metal-oxide-semiconductor memory with nanoscale floating-gate and Ultranarrow channel," Appl. Phys. Lett., vol. 70, no. 7, p. 850, 1997.
-
(1997)
Appl. Phys. Lett.
, vol.70
, Issue.7
, pp. 850
-
-
Guo, L.1
Leobandung, E.2
Chou, S.3
-
138
-
-
0001551483
-
-
A. Nakajima, T. Futatsugi, K. Kosemura, T. Pukano, and N. Yokoyama, "Room temperature operation of Si single-electron memory with self-aligned floating dot gate," Appl. Phys. Lett., vol. 70, no. 13, p. 1742, 1997.
-
(1997)
Appl. Phys. Lett.
, vol.70
, Issue.1
, pp. 3
-
-
Nakajima, A.1
Futatsugi, T.2
Kosemura, K.3
Pukano, T.4
Yokoyama, N.5
-
139
-
-
0031167986
-
-
J. Welser, S. Tiwari, S. Rishton, K. Lee, and Y. Lee, "Room temperature operation of a quantum-dot flash memory," IEEE Electron Device Lett., vol. 18, no. 6, p. 278, 1997.
-
(1997)
IEEE Electron Device Lett.
, vol.18
, Issue.6
, pp. 278
-
-
Welser, J.1
Tiwari, S.2
Rishton, S.3
Lee, K.4
Lee, Y.5
-
140
-
-
0029516376
-
-
S. Tiwari, F. Rana, K. Chan, H. Hanafi, W. Chen, and D. Buchanan, "Volatile and nonvolatile memories in silicon with nano-crystal storage," in Proc. Int. Electron Devices Meeting, 1995, p. 521.
-
Proc. Int. Electron Devices Meeting
, vol.521
-
-
Tiwari, S.1
Rana, F.2
Chan, K.3
Hanafi, H.4
Chen, W.5
Buchanan, D.6
-
141
-
-
0028514569
-
-
K. Yano, T. Ishii, T. Hashimoto, T. Kobayashi, F. Murai, and K. Seki, "Room-temperature single-electron memory," IEEE Trans. Electron Devices, vol. 41, p. 1628, Sept. 1994.
-
(1994)
IEEE Trans. Electron Devices
, vol.41
, pp. 1628
-
-
Yano, K.1
Ishii, T.2
Hashimoto, T.3
Kobayashi, T.4
Murai, F.5
Seki, K.6
-
142
-
-
0030084435
-
-
K. Yano, T. Ishii, T. Mine, F. Murai, and K. Seki, "Singleelectron-memory integrated circuit for giga-to-tera bit storage," in Proc. Int. Solid State Circuits Conf., 1996, p. 266.
-
Proc. Int. Solid State Circuits Conf.
, vol.266
-
-
Yano, K.1
Ishii, T.2
Mine, T.3
Murai, F.4
Seki, K.5
-
143
-
-
0031703349
-
-
K. Yano, T. Ishii, T. Sano, T. Mine, F. Murai, T. Kure, and K. Seki, "A 128 Mb early prototype for gigascale single-electron memories," in Proc. Int. Solid State Circuits Conf., 1998, p. 344.
-
Proc. Int. Solid State Circuits Conf.
, vol.344
-
-
Yano, K.1
Ishii, T.2
Sano, T.3
Mine, T.4
Murai, F.5
Kure, T.6
Seki, K.7
-
144
-
-
84886448113
-
-
T. Ishii, K. Yano, T. Sano, T. Mine, F. Murai, and K. Seki, "Verify: Key to the stable single-electron-memory operation," in Proc. Int. Electron Devices Meeting, 1997, p. 171.
-
Proc. Int. Electron Devices Meeting
, vol.171
-
-
Ishii, K.1
Seki, K.2
-
145
-
-
0030681624
-
-
S. Tiwari, J. Welser, and F. Rana, "Technology and power-speed trade-offs in quantum-dot and nano-crystal memory devices," in Proc. Symp. VLSI Technology, 1997, p. 133.
-
Proc. Symp. VLSI Technology
, vol.133
-
-
Tiwari, S.1
Welser, J.2
Rana, F.3
-
146
-
-
0000298224
-
-
S. Tiwari, F. Rana, H. Hanafi, E. Crabbé, and K. Chan, "A silicon nanocrystals based memory," Appl. Phys. Lett., vol. 68, no. 10, p. 1377, 1996.
-
(1996)
Appl. Phys. Lett.
, vol.68
, Issue.1
-
-
Tiwari, S.1
Rana, F.2
Hanafi, H.3
Crabbé, E.4
Chan, K.5
-
148
-
-
0029547090
-
-
K. Yano, T. Ishii, T. Sano, T. Mine, F. Murai, and K. Seki, "Impact of Coulomb blockade on low-charge limit of memory device," in Proc. Int. Electron Devices Meeting, 1995, p. 525.
-
Proc. Int. Electron Devices Meeting
, vol.525
-
-
Yano, K.1
Ishii, T.2
Sano, T.3
Mine, T.4
Murai, F.5
Seki, K.6
-
149
-
-
84886448066
-
-
T. Ishii, K. Yano, T. Sano, T. Mine, F. Murai, T. Kure, and K. Seki, "A 3-D single-electron-memory cell structure with 2 F2 per bit," in Proc. Int. Electron Devices Meeting, 1997, p. 924.
-
Proc. Int. Electron Devices Meeting
, vol.924
-
-
Ishii, T.1
Yano, K.2
Sano, T.3
Mine, T.4
Murai, F.5
Kure, T.6
Seki, K.7
-
150
-
-
0029404681
-
-
B. Furht, "A survey of multimedia compression techniques and standards-Part II: Video compression," Real-Time Imaging, vol. 1, pp. 319-337, 1995.
-
(1995)
Real-Time Imaging
, vol.1
, pp. 319-337
-
-
Furht, B.1
-
153
-
-
0003291192
-
-
A. K. Lenstra and H. W. L., Jr., "The development of the number field sieve," in Lecture Notes in Math, vol. 1554. Berlin, Germany: Springer-Verlag, 1993.
-
(1993)
Lecture Notes in Math
, vol.1554
-
-
Lenstra, A.K.1
-
155
-
-
0031706871
-
-
C. Wann, L. Su, K. Kenkins, R. Chang, D. Frank, and Y. Taur, "RF perspectives of sub-tenth-micron CMOS," in Proc. Int. J. Solid State Circuits Conf., 1998, p. 254.
-
Proc. Int. J. Solid State Circuits Conf.
, vol.254
-
-
Wann, C.1
Su, L.2
Kenkins, K.3
Chang, R.4
Frank, D.5
Taur, Y.6
-
156
-
-
0028733870
-
"A 20 GHz 8 bit multiplexer 1C implemented with 0.5 /mi wnx/w-gate GAAS MESFET," IEEEJ
-
T. Seshita et al., "A 20 GHz 8 bit multiplexer 1C implemented with 0.5 /mi wnx/w-gate GAAS MESFET," IEEEJ. Solid State Circuits, vol. 29, pp. 1583-1588, Dec. 1994.
-
(1994)
Solid State Circuits
, vol.29
, pp. 1583-1588
-
-
Seshita Et Al, T.1
-
159
-
-
0002546129
-
-
E. R. Possum, "Active pixel sensors: Are CCD dinosaurs?," Proc. SPIE, vol. 1900, p. 2, 1993.
-
(1993)
Proc. SPIE
, vol.1900
, pp. 2
-
-
Possum, E.R.1
-
162
-
-
0030378204
-
-
H.-S. Wong, "Technology and device scaling considerations for CMOS imagers," IEEE Trans. Electron Devices, vol. 17, pp. 2131-2142, Dec. 1996.
-
(1996)
IEEE Trans. Electron Devices
, vol.17
, pp. 2131-2142
-
-
Wong, H.-S.1
-
164
-
-
84886448161
-
-
J. Hosiers, Y. Boersma, A. Kleinmann, D. Verbugt, H. Peek, and A. van dr Sijde, "A 1/3 inch progressive scan 1280(H) × 960 (V) FT-CCD for digital still camera applications," in Proc. Int. Electron Devices Meeting, 1997, p. 185.
-
Proc. Int. Electron Devices Meeting
, vol.185
-
-
Hosiers, J.1
Boersma, Y.2
Kleinmann, A.3
Verbugt, D.4
Peek, H.5
Van Dr Sijde, A.6
-
165
-
-
0031702319
-
-
H. Ihara, H. Yamashita, I. Inoue, T. Yamaguchi, N. Nakamura, and H. Nozaki, "A 3.7 μm × 3.7 μm, square pixel CMOS image sensor for digital still camera application," in Proc. Int. Solid State Circuits Conf., 1998, p. 182.
-
μM ×
, vol.37
, pp. 182
-
-
Ihara, H.1
Yamashita, H.2
Inoue, I.3
Yamaguchi, T.4
Nakamura, N.5
Nozaki, H.6
-
166
-
-
0028135762
-
-
B. Fowler, A. E. Gamal, and D. X. D. Yang, "A CMOS area image sensor with pixel-level A/D conversion," in Proc. Int. Solid State Circuits Conf., 1994, p. 226.
-
Proc. Int. Solid State Circuits Conf.
, vol.226
-
-
Fowler, B.1
Gamal, A.E.2
Yang, D.X.D.3
-
167
-
-
0031678269
-
-
S. Smith, J. Hurwitz, M. Tome, D. Baxter, A. Holmes, M. Panaghiston, R. Henderson, A. Murray, S. Anderson, and P. Denyer, "A single-chip 306 × 244 pixel CMOS NTSC video camera," in Proc. Int. Solid State Circuits Conf., 1998, p. 170.
-
Proc. Int. Solid State Circuits Conf.
, vol.170
-
-
Smith, S.1
Hurwitz, J.2
Tome, M.3
Baxter, D.4
Holmes, A.5
Panaghiston, M.6
Henderson, R.7
Murray, A.8
Anderson, S.9
Denyer, P.10
-
168
-
-
0031700422
-
-
M. Loinaz, K. Singh, A. Blanksby, D. Inglis, K. Azadet, and B. Ackland, "A 200-rnW 3.3 V CMOS color camera 1C producing 352 x 288 24-b video at 30 frames/s," in Proc. Int. Solid State Circuits Conf., 1998, p. 168.
-
Proc. Int. Solid State Circuits Conf.
, vol.168
-
-
Loinaz, M.1
Singh, K.2
Blanksby, A.3
Inglis, D.4
Azadet, K.5
Ackland, B.6
-
170
-
-
0024087662
-
-
C. Sah, "Evolution of the MOS transistor-From conception to VLSI," Proc. IEEE, pp. 1280-1326, 1988.
-
(1988)
Proc. IEEE, Pp.
, vol.1280
-
-
Sah, C.1
-
171
-
-
0031673833
-
-
R. B. Fair, "History of some early developments in ionimplantation technology leading to silicon transistor manufacturing," Proc. IEEE, vol. 86, p. Ill, Jan. 1998.
-
(1998)
Proc. IEEE
, vol.86
-
-
Fair, R.B.1
-
172
-
-
0031672575
-
-
P. Bondy, "Moore's law governs the silicon revolution," Proc. IEEE, vol. 86, p. 78, Jan. 1998.
-
(1998)
Proc. IEEE
, vol.86
, pp. 78
-
-
Bondy, P.1
-
174
-
-
0020310803
-
-
C. Lau, Y. See, D. Scott, J. Bridges, S. Perna, and R. Davies, "Titanium disilicide self-aligned source/drain + gate technology," in Proc. Int. Electron Devices Meeting, 1982, p. 714.
-
Proc. Int. Electron Devices Meeting
, vol.714
-
-
Lau, C.1
See, Y.2
Scott, D.3
Bridges, J.4
Perna, S.5
-
175
-
-
0020293036
-
-
R. Rung, H. Momose, and Y. Nagakubo, "Deep trench isolated CMOS devices," in Proc. Int. Electron Devices Meeting, 1982, p. 237.
-
Proc. Int. Electron Devices Meeting
, vol.237
-
-
Rung, R.1
Momose, H.2
Nagakubo, Y.3
-
176
-
-
0020749253
-
-
S. Wong, C. Sodini, T. Eckstedt, H. Grinolds, K. Jackson, and S. Kwan, "Low pressure nitrided oxide as a thin gate dielectric for MOSFET's," J. Electrochem. Soc., vol. 130, p. 1139, 1983.
-
(1983)
J. Electrochem. Soc.
, vol.130
, pp. 1139
-
-
Wong, S.1
Sodini, C.2
Eckstedt, T.3
Grinolds, H.4
Jackson, K.5
Kwan, S.6
-
178
-
-
0022999388
-
-
J. Y.-C. Sun, Y. Taur, R. Dennard, S. Kiepner, and L. Wang, "0.5 /im-channel CMOS technology optimized for liquidnitrogen-temperature operation," in Proc. Int. Electron Devices Meeting, 1986, p. 236.
-
Proc. Int. Electron Devices Meeting
, vol.236
-
-
Sun, J.Y.-C.1
Taur, Y.2
Dennard, R.3
Kiepner, S.4
Wang, L.5
-
179
-
-
0022991518
-
-
S. Hillenius, R. Liu, G. Georgiou, D. W. R. L. Field, A. Kornblit, D. Boulin, R. Johnston, and W. Lynch, "A symmetric submicron CMOS technology," in Proc. Int. Electron Devices Meeting, 1986, p. 252.
-
Proc. Int. Electron Devices Meeting
, vol.252
-
-
Hillenius, S.1
Liu, R.2
Georgiou, G.3
Field, D.W.R.4
Kornblit, A.5
Boulin, D.6
Johnston, R.7
Lynch, W.8
-
180
-
-
0024895494
-
-
B. Davari, C. Koburger, R. Schulz, M. J. J. D. Warnock, Y. Taur, W. Schwittek, M. K. J. K. DeBrosse, and J. Mauer, "A new planarization technique, using a combination of RIE and chemical mechanical polish (CMP)," in Proc. Int. Electron Devices Meeting, 1989, p. 61.
-
Proc. Int. Electron Devices Meeting
, vol.61
-
-
Davari, B.1
Koburger, C.2
Schulz, R.3
Warnock, M.J.J.4
Taur, Y.5
Schwittek, W.6
Debrosse, K.J.K.7
Mauer, J.8
Rie, U.C.O.9
-
181
-
-
85059938718
-
-
F. White, W. Hill, S. Eslinger, E. Payne, W. Cote, B. Chen, and K. Johnson, "Damascene stud local interconnect in CMOS technology," in Proc. Int. Electron Devices Meeting, 1992, p. 301.
-
Proc. Int. Electron Devices Meeting
, vol.301
-
-
White, F.1
Hill, W.2
Eslinger, S.3
Payne, E.4
Cote, W.5
Chen, B.6
Johnson, K.7
-
182
-
-
0027848479
-
-
J. Paraszczak, D. Edelstein, S. Cohen, E. Babich, and J. Hummel, "High performance dielectrics and processes for ULSI interconnection technologies," in Proc. Int. Electron Devices Meeting, 1993, p. 261.
-
Proc. Int. Electron Devices Meeting
, vol.261
-
-
Paraszczak, J.1
Edelstein, D.2
Cohen, S.3
Babich, E.4
Hummel, J.5
-
183
-
-
33747546465
-
-
Hon-Sum Philip Wong (Senior Member, IEEE) received the B.Sc. (Hon.) degree from University of Hong Kong, Hong Kong, in 1982 and the Ph.D. degree in electrical engineering from Lehigh University, Bethlehem, PA, in 1988. He joined IBM T. J. Watson Research Center, Yorktown Heights, NY, in 1988 as a Research Staff Member. From 1988 to 1992, he worked on the design, fabrication, and characterization of a high-resolution, high color-fidelity CCD image scanner for art work archiving. Since 1993, he has been working on analysis, fabrication, and applications of nanoscale CMOS devices. His recent work included simulations of discrete random dopant fluctuation effects in small MOSFET's, the physics and technology of double-gate and back-gate MOSFET's, CMOS projection displays, and CMOS image sensors. David J. Frank (Member, IEEE) received the B.S. degree from the California Institute of Technology, Pasadena, in 1977 and the Ph.D. degree in physics from Harvard University, Cambridge, MA, in 1983. Since 1983, he has been employed at the IBM T. J. Watson Research Center, Yorktown Heights, NY, where he is a Research Staff Member. His studies have included nonequilibrium superconductivity, modeling and measuring III-V devices, and exploring the limits of scaling of silicon technology. His recent work includes the modeling of innovative silicon devices, analysis of CMOS scaling issues, investigating the usefulness of energy-recovering CMOS logic and reversible computing concepts, and low-power circuit design. His interests include superconductor and semiconductor device physics, modeling and measurement, circuit design, and percolation in two-dimensional systems. Paul M. Solomon (Fellow, IEEE) was born Cape Town, South Africa. He received the B.Sc. degree in electrical engineering from the University of Cape Town, South Africa, in 1968 and the Ph.D. degree from the Technion, Haifa, Israel, in 1974 for work on the breakdown properties of silicon dioxide. Since 1975, he has been a Research Staff Member at the IBM T. J. Watson Research Center, Yorktown Heights, NY. At IBM, his interests have been in the field of high-speed semiconductor devices. He has contributed to the theory of scaling bipolar transistors to very small dimensions and has developed methodologies to compare the performance of high-speed semiconductor devices. The design of high-speed semiconductor logic devices has been a continuing topic, ranging from self-aligned bipolar transistors through novel heterostructure field effect transistors and more recently to novel CMOS device concepts. He has contributed to the physics of transport in semiconductors and has taught the physics of high-speed devices at Stanford University. Dr. Solomon is a member of APS. Clement H. J. Wann received the B.S. degree from National Taiwan University in 1988 and the M.S. and Ph.D. degrees from University of California, Berkeley, in 1992 and 1996, respectively, all in electrical engineering. He joined IBM T. J. Watson Research Center, Yorktown Heights, NY, as a Research Staff Member in 1996. He is currently with IBM Semiconductor Research and Development Center, East Fishkill, NY. Jeffrey J. Welser (Member, IEEE) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1988, 1989, and 1994, respectively. He has held short-term positions at Sumitomo Electric in Japan (1988) and at IBM T. J. Watson Research Center (1989-1990), Yorktown Heights, NY, working on GaAs devices, and a postdoctoral position at Stanford University (1995), where he continued his thesis research on SiGe materials and their applications to MOSFET devices. Since 1995, he has been a Research Staff Member at IBM T. J. Watson Research Center, and his current research activities focus on novel silicon devices, including vertical transistors and nanostructures, for a variety of memory applications.
-
(1988)
, vol.1982
, pp. 1988
-
-
Kong, H.1
-
184
-
-
0031701561
-
-
J. P. A. van der Wagt, A. C. Seabaugh, and E. A. Beam, III, "RTD/HFET low standby power SRAM gain cell," IEEE Electron Device Lett., vol. 19, pp. 7-9, Jan. 1998.
-
His Paper Describes a New High-density Low-power Circuit Approach for Implementing Static Random Access Memory (SRAM) Using Low Current Density Resonant Tunneling Diodes (RTD's). after An Overview of Semiconductor Random Access Memory Architecture and Technology, the Concept Oftunneling-based SRAM (TSRAM) Is Introduced. Experimental Results for a Compound Semiconductor
, vol.1
, Issue.99
-
-
Van Der Wagt, T.S.J.1
|