High-performance 0.08 μm CMOS

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1996, Pages 12-13

  Su, L ^a   Subbanna, S ^a   Crabbe, E ^a   Agnello, P ^a   Nowak, E ^a   Schulz, R ^a   Rauch, S ^a   Ng, H ^a   Newman, T ^a   Ray, A ^a   Hargrove, M ^a   Acovic, A ^a   Snare, J ^a   Crowder, S ^a   Chen, B ^a   et al , ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC MATERIALS; DOPING (ADDITIVES); ELECTRIC CURRENTS; ELECTRON DEVICE MANUFACTURE; FIELD EFFECT TRANSISTORS; GATES (TRANSISTOR); PERFORMANCE; PRODUCT DESIGN; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES;

DOPANT ENGINEERING; LOW VOLTAGE COMPATIBILITY; SHORT CHANNEL EFFECTS;

CMOS INTEGRATED CIRCUITS;

EID: 0029713063     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)