Subband structure engineering for performance enhancement of Si MOSFETs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 219-222

  Takagi, Shin ichi ^a   Koga, Junji ^a   Toriumi, Akira ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INVERSION LAYER CAPACITANCE; INVERSION LAYER MOBILITY; SUBBAND STRUCTURE ENGINEERING;

BAND STRUCTURE; CAPACITANCE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SILICON ON INSULATOR TECHNOLOGY;

MOSFET DEVICES;

EID: 84886448137     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)