SYMMETRIC SUBMICRON CMOS TECHNOLOGY.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1986, Pages 252-255

  Hillenius, S J ^a   Liu, R ^a   Georgiou, G E ^a   Field, R L ^a   Williams, D S ^a   Kornblit, A ^a   Boulin, D M ^a   Johnston, R L ^a   Lynch, W T ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOGIC DEVICES - GATES; SEMICONDUCTING SILICON COMPOUNDS - DOPING; TRANSISTORS - JUNCTIONS;

CHANNEL DOPING SYMMETRY; JUNCTION DEPTH; SHEET RESISTIVITY; SYMMETRIC SUBMICRON COMPLEMENTARY MOS (CMOS); THRESHOLD VOLTAGES;

SEMICONDUCTOR DEVICES, MOS;

EID: 0022991518     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)