Silicon-on-insulator 'gate-all-around device'

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1990, Pages 595-598

  Colinge, J P ^a   Gao, M H ^a   Romano Rodriguez, A ^a   Maes, H ^a   Claeys, C ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES, MOSFET;

GATE-ALL-AROUND DEVICES; SOI MOSFET;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0025575976     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)