HALO DOPING EFFECTS IN SUBMICRON DI-LDD DEVICE DESIGN.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1985, Pages 230-233

  Codella, Christopher F ^a   Ogura, Seiki ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICE MANUFACTURE;

DI-LDD; HALO DOPING; SUBMICRON CHANNEL DEVICES;

SEMICONDUCTOR MATERIALS;

EID: 0022290066     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iedm.1985.190938     Document Type: Conference Paper

References (3)