Quadrupole mass spectrometry of reactive plasmas

Journal of Physics D: Applied Physics

Volumn 45, Issue 40, 2012, Pages

  Benedikt, J ^a   Hecimovic, A ^a   Ellerweg, D ^a   Von Keudell, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE DENSITY; ATMOSPHERIC PRESSURE PLASMAS; CALIBRATION PROCEDURE; DIAGNOSTIC METHODS; DIAGNOSTIC SYSTEMS; ELECTRON IMPACT-IONIZATION; ENERGETIC ION; ENERGY DISTRIBUTION FUNCTIONS; EXCITED SPECIES; GASPHASE; HIGH POWER DENSITY; HIGH-QUALITY MATERIALS; ION ENERGY DISTRIBUTION FUNCTIONS; LOW PRESSURES; METASTABLES; NEUTRAL PARTICLES; NON-EQUILIBRIUM CHARACTERS; NON-EQUILIBRIUM ELECTRONS; PLASMA ANALYSIS; PLASMA CHEMISTRIES; PROPER DESIGN; QUADRUPOLE MASS SPECTROMETRY; QUADRUPOLES; REACTIVE PLASMAS; REACTIVE RADICALS; TIME RESOLUTION;

DEPOSITION; HYDROCARBONS; IMPACT IONIZATION; ION BOMBARDMENT; ION SOURCES; MASS SPECTROMETRY; MATERIALS PROPERTIES; NEUTRONS; PLASMA SOURCES;

ELECTRIC DISCHARGES;

EID: 84866851014     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/40/403001     Document Type: Review

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