Time-resolved measurements of the ion energy distribution function in a pulsed discharge using a double gating technique

Measurement Science and Technology

Volumn 16, Issue 12, 2005, Pages 2446-2452

  Voronin, S A ^a   Alexander, M R ^b   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

Electrostatic probe; Ion energy distribution; Mass spectrometry; Pulsed plasma; RF discharge; Time resolved

Indexed keywords

FREQUENCY MODULATION; IONS; MEASUREMENTS; PLASMAS;

PLASMA POTENTIAL; PULSED PLASMAS;

DETECTORS;

MEASUREMENT METHOD;

EID: 27944471055     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/16/12/007     Document Type: Article

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