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Volumn 42, Issue 13, 2009, Pages

Time evolution of ion energies in HIPIMS of chromium plasma discharge

Author keywords

[No Author keywords available]

Indexed keywords

ARGON ATMOSPHERES; CRIII IONS; DEPOSITION FLUXES; ENERGY-RESOLVED MASS SPECTROMETRY; HIGH ENERGY; HIGH-POWER; HOT METAL; ION DENSITY; ION ENERGIES; ION ENERGY DISTRIBUTION FUNCTIONS; LANGMUIR PROBE MEASUREMENTS; LOW ENERGIES; LOW-ENERGY PEAKS; PLASMA COMPOSITION; PLASMA DISCHARGE; TEMPORAL EVOLUTION; TIME EVOLUTIONS; TIME RESOLVED MEASUREMENT;

EID: 70249097378     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/13/135209     Document Type: Article
Times cited : (74)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.