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Volumn 42, Issue 13, 2009, Pages
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Time evolution of ion energies in HIPIMS of chromium plasma discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON ATMOSPHERES;
CRIII IONS;
DEPOSITION FLUXES;
ENERGY-RESOLVED MASS SPECTROMETRY;
HIGH ENERGY;
HIGH-POWER;
HOT METAL;
ION DENSITY;
ION ENERGIES;
ION ENERGY DISTRIBUTION FUNCTIONS;
LANGMUIR PROBE MEASUREMENTS;
LOW ENERGIES;
LOW-ENERGY PEAKS;
PLASMA COMPOSITION;
PLASMA DISCHARGE;
TEMPORAL EVOLUTION;
TIME EVOLUTIONS;
TIME RESOLVED MEASUREMENT;
ARGON;
CHROMIUM;
DISTRIBUTION FUNCTIONS;
FILM GROWTH;
HIGH ENERGY PHYSICS;
IONIZATION OF GASES;
MAGNETRONS;
MASS SPECTROMETRY;
METAL IONS;
METALS;
PLASMA DEPOSITION;
PLASMAS;
SMELTING;
SPACE PROBES;
TRACE ANALYSIS;
ELECTRIC DISCHARGES;
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EID: 70249097378
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/13/135209 Document Type: Article |
Times cited : (74)
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References (25)
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