Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arcs

Journal of Applied Physics

Volumn 99, Issue 12, 2006, Pages

  Rosén, Johanna ^a   Anders, André ^b   Mráz, Stanislav ^a   Atiser, Adil ^a   Schneider, Jochen M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION ENERGY DISTRIBUTIONS; MAXWELLIAN DISTRIBUTIONS; THIN FILM PROPERTIES;

ALUMINUM; ELECTRIC CHARGE; ELECTRIC POWER DISTRIBUTION; IONS; OXYGEN; VACUUM;

ARGON;

EID: 33745697575     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2206413     Document Type: Article

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