From electron depletion to quasi-neutrality: The sheath-bulk transition in RF modulated discharges

Journal of Physics D: Applied Physics

Volumn 42, Issue 19, 2009, Pages

  Brinkmann, Ralf Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGEBRAIC APPROXIMATION; ASYMPTOTIC SOLUTIONS; BOLTZMANN; BULK TRANSITION; CLOSED FORM; DEBYE LENGTH; ELECTRICAL FIELD; ELECTRON DENSITIES; ELECTRON DEPLETION; EXACT SOLUTION; GRADUAL TRANSITION; HIGH-VOLTAGE SHEATH; MODEL APPROACH; NUMERICAL SOLUTION; RF MODULATION; SINGLE SPECIES;

ALGEBRA; BOLTZMANN EQUATION; CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; ELECTRON TEMPERATURE; MODULATION; PLASMA SHEATHS; POISSON EQUATION; PROBLEM SOLVING; THERMAL EFFECTS;

ELECTRONS;

EID: 70350633324     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/194009     Document Type: Article

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