An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron

Measurement Science and Technology

Volumn 18, Issue 7, 2007, Pages 1872-1876

  Voronin, S A ^a   Clarke, G C B ^b   Cada M ^a   Kelly, P J ^b   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

Ion energy distribution; Mass spectrometry; Pulsed plasma; Time resolved

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRODES; MAGNETRONS; MASS SPECTROMETRY; SYNCHRONIZATION; VACUUM APPLICATIONS;

ELECTROSTATIC CHOPPING; ION ENERGY DISTRIBUTION; PULSED PLASMA DISCHARGES;

PLASMA THEORY;

ELECTRIC FIELD EFFECTS; ELECTRODES; MAGNETRONS; MASS SPECTROMETRY; PLASMA THEORY; SYNCHRONIZATION; VACUUM APPLICATIONS;

EID: 34250717314     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/7/012     Document Type: Article

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