A technique for obtaining time- and energy-resolved mass spectroscopic measurements on pulsed plasmas

Measurement Science and Technology

Volumn 13, Issue 9, 2002, Pages 1431-1436

  Karkari, S K ^a   Backer H ^a   Forder, D ^a   Bradley, J W ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Ion energy distribution; Plasma diagnostics; Plasma ion; Time resolved; Vacuum mass spectrometry

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTROSTATICS; FREQUENCIES; IONS; MAGNETRONS; SPECTROSCOPIC ANALYSIS;

ENERGY-RESOLVED MASS SPECTROSCOPY; ION ENERGY DISTRIBUTION FUNCTION (IEDF);

PLASMAS;

MEASUREMENT METHOD; PLASMA; SPECTROSCOPY;

EID: 0036738571     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/13/9/308     Document Type: Article

References (13)

1. The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge