Investigation of the pulsed magnetron discharge by time- and energy-resolved mass spectrometry

Vacuum

Volumn 68, Issue 2, 2002, Pages 171-181

  Mišina, Martin ^a   Bradley, James W ^b   Bäcker, Hermann ^b   Aranda Gonzalvo, Yolanda ^b   Karkari, Shantanu K ^b   Forder, Don ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Ion energies; Oxide effects; Plasma; Pulsed magnetron

Indexed keywords

ARGON; ELECTRIC POTENTIAL; ION BEAMS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; NEGATIVE IONS; PLASMA THEORY; POSITIVE IONS; SUBSTRATES;

MASS SPECTROSCOPY;

ELECTRIC DISCHARGES;

EID: 0037206621     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00380-9     Document Type: Article

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