Investigations of CH4, C2H2 and C2H4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry

Journal of Physics D: Applied Physics

Volumn 32, Issue 15, 1999, Pages 1876-1886

  Deschenaux, Ch ^a   Affolter, A ^a   Magni, D ^a   Hollenstein, Ch ^a   Fayet, P ^b  

^a EPFL   (Switzerland)

^b Tetra Pak International SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; COMPOSITION; ELECTRON ENERGY LEVELS; ELECTRONS; ETHYLENE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; IONS; MASS SPECTROMETRY; METHANE; MONOMERS; NANOSTRUCTURED MATERIALS;

HYDROCARBON PLASMAS; IONIC PLASMA COMPOSITION; PLASMA PRODUCED NEUTRAL SPECIES; RADIOFREQUENCY PLASMAS;

PLASMAS;

EID: 0032685276     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/15/316     Document Type: Article

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