Pulsed dc magnetron discharges and their utilization in plasma surface engineering

Contributions to Plasma Physics

Volumn 44, Issue 5-6, 2004, Pages 426-436

  Vlcek J ^a   Pajdarova A D ^a   Musil, J ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

High power discharges; Ion bombardment; Mid frequency discharges; Pulsed magnetron sputtering; Time resolved diagnostics

Indexed keywords

ARGON; DYNAMICS; FILM GROWTH; ION BOMBARDMENT; IONIZATION OF GASES; LANGMUIR PROBES; MAGNETRON SPUTTERING; MASS SPECTROMETRY; PLASMA DIAGNOSTICS; PLASMA STABILITY; REACTIVE SPUTTERING; SURFACE DISCHARGES; WORKING PRESSURE;

FREQUENCY DISCHARGES; HIGH POWER; HIGH-POWER DISCHARGE; IONS BOMBARDMENT; MID-FREQUENCY; MID-FREQUENCY DISCHARGE; PULSED DC MAGNETRON DISCHARGE; PULSED MAGNETRON SPUTTERING; TIME-RESOLVED; TIME-RESOLVED DIAGNOSTIC;

OPTICAL EMISSION SPECTROSCOPY;

EID: 5744230452     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410083     Document Type: Conference Paper

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