Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Kudlacek P ^a   Vlcek, J ^a   Burcalova K ^a   Luka, J ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; IONIZATION; MAGNETRON SPUTTERING; MASS SPECTROMETRY; PLASMA SOURCES;

IONIZED FRACTION; MAGNETRON DISCHARGES; REPETITION FREQUENCIES;

TITANIUM;

EID: 43149096474     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/025010     Document Type: Article

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