Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma

Vacuum

Volumn 80, Issue 6, 2006, Pages 581-587

  Takagi, Y ^a   Sakashita, Y ^a   Toyoda, H ^a   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Backscattering; Energy distribution function; Magnetron plasma; Monte Carlo simulation; Sputtering; TRIM code

Indexed keywords

BACKSCATTERING; MAGNETRON SPUTTERING; MASS SPECTROMETRY; PLASMAS;

ENERGY DISTRIBUTION FUNCTION; MAGNETRON PLASMA; TRIM CODE;

ATOMS;

EID: 32944479297     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.10.001     Document Type: Article

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