Radical and film growth kinetics in methane radio-frequency glow discharges

Journal of Applied Physics

Volumn 79, Issue 11, 1996, Pages 8735-8747

  Dagel, D J ^a   Mallouris, C M ^a,b   Doyle, J R ^a  

^a MACALESTER COLLEGE   (United States)

^b UNIVERSITY OF CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001098881     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362500     Document Type: Review

References (44)

1. W. Tsang and R. F. Hampson, J. Phys. Chem. Ref. Data 15, 1087 (1986).
2. D. L. Baulch, C. J. Cobos, and R. A. Cox, J. Phys. Chem. Ref. Data 21 (1992).
3. L. M. Yeddanapalli, J. Chem. Phys. 10, 249 (1942).
4. J. E. Manton and A. W. Tickner, Can. J. Chem. 38, 858 (1960).
5. A. W. Tickner, Can. J. Chem. 39, 87 (1961).
6. M. J. Vasile and G. Smolinsky, Int. J. Mass Spectrom. Ion Phys. 16, 137 (1975).
7. M. J. Vasile and G. Smolinsky, Int. J. Mass Spectrom. Ion Phys. 18, 179 (1975).
8. G. Smolinsky and M. J. Vasile, J. Macromol. Sci.-Chem. A 10, 473 (1976).
9. P. Koidl, Ch. Wild, B. Dischler, J. Wagner, and M. Ramsteiner, Mater. Sci. Forum 52&53, 41 (1989).
10. K. Tachibana, M. Nishida, H. Harima, and Y. Urano, J. Phys. D 17, 1727 (1984).
11. L. E. Kline, W. D. Partlow, and W. E. Bies, J. Appl. Phys. 65, 70 (1989).
12. A. Rhallabi and Y. Catherine, IEEE Trans. Plasma Sci. PS-19, 270 (1991).
13. E. Gogolides, D. Mary, A. Rhallabi, and G. Turban, Jpn. J. Appl. Phys. 34, 261 (1995).
14. H. Toyoda, H. Kojima, and H. Sugai, Appl. Phys. Lett. 54, 1507 (1989).
15. H. Kojima, H. Toyoda, and H. Sugai, Appl. Phys. Lett. 55, 1292 (1989).
16. H. Sugai, H. Kojima, A. Ishida, and H. Toyoda, Appl. Phys. Lett. 56, 2616 (1990).
17. H. Sugai and H. Toyoda, J. Vac. Sci. Technol. A 10, 1193 (1992).
18. W. Moller, W. Fukarek, K. Lange, A. von Keudell, and W. Jacob, Jpn. J. Appl. Phys. 34, 2163 (1995).
19. G. G. A. Perkins, E. R. Austin, and F. W. Lampe, J. Am. Chem. Soc. 101, 110 (1979).
20. R. T. White, R. L. Espino-Rios, D. S. Rogers, M. A. Ring, and H. E. O'Neal, Int. J. Chem. Kinetics 17, 1029 (1985).
21. P. A. Longeway, H. A. Weakliem, and R. D. Estes, J. Phys. Chem. 88, 3282 (1984).
22. P. A. Longeway, R. D. Estes, and H. A. Weakliem, J. Phys. Chem. 88, 73 (1984).
23. J. R. Doyle, D. A. Doughty, and A. Gallagher, J. Appl. Phys. 68, 4375 (1990).
24. J. R. Doyle, D. A. Doughty, and A. Gallagher, J. Appl. Phys. 69, 4169 (1991).
25. Referred to as "primary" and "secondary" reactions respectively in the pyrolysis and photolysis literature.
26. 4, the steady-state pressure change is near zero.
27. V. A. Godyak, IEEE Trans. Plasma Sci. PS-19, 660 (1991).
28. N. Fourches and G. Turban, Thin Solid Films 240, 28 (1994).
29. G. F. Froment and K. B. Bischoff, Chemical Reactor Analysis and Design, 2nd ed. (Wiley, New York, 1990).
30. J. F. O'Hanlon, A User's Guide to Vacuum Technology, 2nd ed. (Wiley, New York, 1989), p. 433.
31. B. E. Cherrington, Gaseous Electronics and Gas Lasers (Pergamon, New York, 1979), p. 119.
32. Y. Catherine, A. Pastol, L. Athouel, and C. Fourrier, IEEE Trans. Plasma Sci. PS-18, 923 (1990).
33. M. J. Kushner, J. Appl. Phys. 62, 2803 (1987).
34. C. E. Melton and P. S. Rudolph, J. Chem. Phys. 47, 1771 (1967).
35. Since this reaction is apparently well into the fall-off regime under our conditions, the rate constant will increase approximately proportionally to the third body partial pressure. Thus, at pressures in the several hundred mTorr range this reaction may not be negligible.
36. P. J. Chantry, J. Appl. Phys. 62, 1141 (1987).
37. M. R. Berman and M. C. Lin, Chem. Phys. 82, 435 (1983).
38. H. F. Winters, Chem. Phys. 36, 353 (1979).
39. S. G. Lias, G. J. Collin, R. E. Rebber, and P. Ausloos, J. Chem. Phys. 52, 1841 (1970).
40. R. Gorden, Jr. and P. Ausloos, J. Chem. Phys. 47, 1799 (1967).
41. H. Kobayashi, A. T. Bell, and M. Shen, Macromolecules 7, 277 (1974).
42. E. H. A. Dekempeneer, J. Smeets, J. Meneve, L. Eersels, and R. Jacobs, Thin Solid Films 241, 269 (1994).
43. 3 radicals contribute, the required density for each species is correspondingly lower.
44. D. A. Doughty, J. R. Doyle, G. H. Lin, and A. Gallagher, J. Appl. Phys. 67, 6220 (1990).