Sputter process diagnostics by negative ions

Journal of Applied Physics

Volumn 83, Issue 10, 1998, Pages 5083-5086

  Zeuner, Michael ^a   Neumann, Horst ^a   Zalman, Jan ^b   Biederman, Hynek ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001587705     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367325     Document Type: Article

References (16)

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