The influence of the ionizer geometry on the absolute density calibration of reactive neutral species in a molecular beam mass spectrometry

Review of Scientific Instruments

Volumn 83, Issue 4, 2012, Pages

  Krähling, Tobias ^a,b   Ellerweg, Dirk ^a   Benedikt, Jan ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE DENSITY; ABSOLUTE NUMBER; BACKGROUND DENSITY; BACKGROUND SIGNALS; BEAM PARTICLES; CRITICAL ISSUES; DETECTION PROBABILITIES; DIAGNOSTIC TECHNIQUES; MOLECULAR BEAM MASS SPECTROMETRIES; MONTE CARLO SIMULATION; NEUTRAL SPECIES; NON EQUILIBRIUM; PARTICLE DENSITIES; PARTICLE TRAJECTORIES; PROPER DESIGN; REACTIVE PARTICLES; REACTIVE PLASMAS; REACTIVE SPECIES; SAMPLING SYSTEMS;

CALIBRATION; MASS SPECTROMETRY; MOLECULAR BEAMS; MONTE CARLO METHODS; SIGNAL SAMPLING;

IONIZATION;

EID: 84860560068     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3703305     Document Type: Review

References (12)

1. J. Benedikt, S. Agarwal, D. Eijkman, W. Vandamme, M. Creatore, and M. C. M. van de Sanden, J. Vac. Sci. Technol. A 23, 1400 (2005). 10.1116/1.2006138
2. H. Singh, J. W. Coburn, and D. B. Graves, J. Vac. Sci. Technol. A 17, 2447 (1999). 10.1116/1.581981
3. H. Singh, J. W. Coburn, and D. B. Graves, J. Vac. Sci. Technol. A 18, 299 (2000). 10.1116/1.582183
4. S. Agarwal, G. W. W. Quax, M. C. M. van de Sanden, D. Maroudas, and E. S. Aydil, J. Vac. Sci. Technol. A 22, 71 (2004). 10.1116/1.1627767
5. J. Benedikt, D. C. Schram, and M. C. M. van de Sanden, J. Phys. Chem. A 109, 10153 (2005). 10.1021/jp052623a
6. R. Feres and G. Yablonsky, Chem. Eng. Sci. 59, 1541 (2004). 10.1016/j.ces.2004.01.016
7. U. Scharfenort, Ph.D. dissertation (University Duisburg-Essen, Germany, 2007).
8. J. Maurer, Boost Random C Library (Version 1.35.0), 2008.
9. J. Benedikt, D. Ellerweg, and A. von Keudell, Rev. Sci. Instrum. 80, 055107 (2009). 10.1063/1.3133804
10. D. Ellerweg, J. Benedikt, A. von Keudell, N. Knake, and V. Schulz-von der Gathen, New J. Phys. 12, 013021 (2010). 10.1088/1367-2630/12/1/013021
11. S. Agarwal, B. Hoex, M. C. M. van de Sanden, D. Maroudas, and E. S. Aydil, Appl. Phys. Lett. 83, 4918 (2003). 10.1063/1.1630843
12. E. Stoffels, Y. Aranda Gonzalvo, T. D. Whitmore, D. L. Seymour, and J. A. Rees, Plasma Sources Sci. Technol. 16, 549 (2007). 10.1088/0963-0252/16/3/014