Comparison of 2D hybrid simulational and experimental results for dual-frequency capacitively coupled argon plasmas

Plasma Science and Technology

Volumn 13, Issue 2, 2011, Pages 181-187

  Bi, Zhenhua ^a   Xu, Xiang ^a   Liu, Yongxin ^a   Jiang, Xiangzhan ^a   Lu, Wenqi ^a   Wang, Younian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

DF CCP; floating double probe; hybrid model; IADF; IEDF

Indexed keywords

DF CCP; DOUBLE PROBE; HYBRID MODEL; IADF; IEDF;

DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY ANALYZERS; ION BEAMS; MASS SPECTROMETRY; PROBES;

ELECTRON TEMPERATURE;

EID: 79955378384     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/13/2/11     Document Type: Article

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