Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 1, 2004, Pages 71-81

  Agarwal, Sumit ^a   Quax, Guido W W ^b   Van de Sanden, M C M ^b   Maroudas, Dimitrios ^c   Aydil, Eray S ^a  

^a University of California   (United States)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA CHAMBERS; THRESHOLD IONIZATION MASS SPECTROMETRY (TIMS);

DENSITY OF GASES; IONIZATION OF GASES; MASS SPECTROMETERS; MASS SPECTROMETRY; MOLECULAR BEAMS; MOLECULAR VIBRATIONS; PLASMA APPLICATIONS; THERMAL EFFECTS;

FREE RADICALS;

EID: 1242352014     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1627767     Document Type: Article

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