Molecular beam mass spectrometry studies of the gas-phase chemistry occurring during microwave plasma assisted chemical vapour deposition of diamond

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1377-1382

  Leeds, S M ^a   May, P W ^a   Bartlett, E ^a   Ashfold, M N R ^a   Rosser, K N ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Gas phase chemistry; Microwave plasma; Molecular beam mass spectrometry

Indexed keywords

DIAMONDS; HYDROCARBONS; MICROWAVES; MOLECULAR BEAM EPITAXY; PHASE COMPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE PHENOMENA; TEMPERATURE;

GAS PHASE CHEMISTRY; MICROWAVE PLASMA;

MASS SPECTROMETRY;

EID: 0032594414     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00014-x     Document Type: Article

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