Fast, kinetically self-consistent simulation of RF modulated plasma boundary sheaths

Journal of Physics D: Applied Physics

Volumn 45, Issue 18, 2012, Pages

  Shihab, Mohammed ^a   Ziegler, Dennis ^a   Brinkmann, Ralf Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN; CARTESIANS; COLLISIONLESS; COMPUTATIONAL EFFORT; DISCHARGE REGIMES; DISCRETIZATIONS; ELECTRICAL FIELD; FLUID MODELS; FOURIER MODES; ION DENSITY; ION ENERGY AND ANGULAR DISTRIBUTION; ION ENERGY DISTRIBUTIONS; ION FLUXES; ITERATIVE ALGORITHM; KINETIC EQUATIONS; MONTE CARLO; NEW MODEL; ONE-DIMENSIONAL GEOMETRY; PARTICLE-IN-CELL; PLASMA BOUNDARY; PLASMA BULK; POISSON'S EQUATION; POST PROCESSING; POTENTIAL VALUES; SELF-CONSISTENCY; SELF-CONSISTENT SIMULATIONS; SHEATH VOLTAGE; SPACETIME; SPATIO-TEMPORAL; TOTAL ENERGY FLUX;

ALGORITHMS; ANGULAR DISTRIBUTION; COMPUTER SIMULATION; HARMONIC ANALYSIS; INTEGRAL EQUATIONS; IONS; KINETICS; MATHEMATICAL MODELS; PLASMAS; POISSON EQUATION; VALUE ENGINEERING;

ELECTRIC DISCHARGES;

EID: 84860115687     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/18/185202     Document Type: Article

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