High temporal resolution ion energy distribution functions in HIPIMS discharges

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Mishra, Anurag ^a   Clarke, Gregory ^a   Kelly, Peter ^b   Bradley, James W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

HIPIMS; Ion energy distribution function; Mass spectrometry; Pulsed magnetron; Time resolved

Indexed keywords

AFTER INITIATION; CIRCULAR MAGNETRON; DISCHARGE VOLTAGE PULSE; HIGH ENERGY TAILS; HIGH TEMPORAL RESOLUTION; HIGH-POWER; HIGH-TIME RESOLUTION; HIPIMS; ION ENERGY DISTRIBUTION FUNCTION; ION ENERGY DISTRIBUTION FUNCTIONS; METAL FLUXES; NARROW DISTRIBUTION; OPERATING CONDITION; PEAK POWER DENSITIES; PULSE WIDTH; REPETITION RATE; TIME EVOLUTIONS; TIME-RESOLUTION; TIME-RESOLVED;

ELECTRIC POTENTIAL; ELECTRIC POWER DISTRIBUTION; ION BEAMS; IONS; MASS SPECTROMETRY; PLASMA SOURCES; PULSE REPETITION RATE;

DISTRIBUTION FUNCTIONS;

EID: 77953771489     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931601     Document Type: Conference Paper

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