Ion flux characteristics in high-power pulsed magnetron sputtering discharges

EPL

Volumn 77, Issue 4, 2007, Pages

  Vlcek J ^a   Kudlacek P ^a   Burcalova K ^a   Musil, J ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77957745027     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/77/45002     Document Type: Article

References (17)

1. Kouznetsov V., Macák K., Schneider J. M., Helmersson U. and Petrov I. 1999 Surf. Coat. Technol. 122 290
2. Macák K., Kouznetsov V., Schneider J., Helmersson U. and Petrov I. 2000 J. Vacuum Sci. Technol. A 18 1533
3. Ehiasarian A. P., Hovsepian P. Eh., Hultman L. and Helmersson U. 2004 Thin Solid Films 457 270
4. Vlek J., Pajdarová A. D. and Musil J. 2004 Contrib. Plasma Phys. 44 426
5. Vaina P., Meko M., Ganciu M., Bretagne J., Boisse-Laporte C., de Poucques L. and Touzeau M. 2005 Europhys. Lett. 72 390
6. Konstantinidis S., Dauchot J. P., Ganciu M., Ricard A. and Hecq M. 2006 J. Appl. Phys. 99 013307
7. Anders A. 2004 Surf. Coat. Technol. 183 301
8. Christie D. J. 2005 J. Vacuum Sci. Technol. A 23 330
9. Helmersson U., Lattemann M., Bohlmark J., Ehiasarian A. P. and Gudmundsson J. T. 2006 Thin Solid Films 513 1
10. Bohlmark J., Ehiasarian A. P., Lattemann M., Alami J. and Helmersson U. Society of Vacuum Coaters 505/856-7188, 48th Annual Technical Conference Proceedings (2005) ISSN 0737-5921, p. 470
11. Lieberman M. A. and Lichtenberg A. J. 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley-Interscience) 282
12. Kadlec S., Quaeyhaegens C., Knuyt G. and Stals L. M. 1997 Surf. Coat. Technol. 89 177
13. Miina M., Shaginyan L. R., Maek M. and Panjan P. 2001 Surf. Coat. Technol. 142-144 348
14. Bradley J. W., Bäcker H., Aranda-Gonzalvo Y., Kelly P. J. and Arnell R. D. 2002 Plasma Sources Sci. Technol. 11 165
15. Thompson M. W. 1968 Philos. Mag. 18 377
16. Lu J. and Kushner M. J. 2000 J. Appl. Phys. 87 7198
17. Pajdarová A. D. 2005 PhD Thesis University of West Bohemia, Plzen, Czech Republic