Molecular beam sampling system with very high beam-to-background ratio: The rotating skimmer concept

Review of Scientific Instruments

Volumn 80, Issue 5, 2009, Pages

  Benedikt, J ^a   Ellerweg, D ^a   Von Keudell, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT ENVIRONMENT; ATMOSPHERIC PRESSURE PLASMAS; BACKGROUND PRESSURE; BACKGROUND RATIO; DETECTION LIMITS; DIFFERENTIAL PUMPING; HIGH PRESSURE REGIONS; LOW DENSITY; MICROPLASMA SOURCE; MOLECULAR BEAM SAMPLING; NOVEL METHODS; OXYGEN ATOM; REACTIVE SPECIES; SPECTROMETRY MEASUREMENTS; VACUUM SYSTEM;

ATMOSPHERIC PRESSURE; MASS SPECTROMETRY; MOLECULAR BEAMS; OXYGEN; PUMPS; ROTATION; VACUUM;

MOLECULAR DYNAMICS;

EID: 66549123724     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3133804     Document Type: Article

References (11)

1. H. Singh, J. Coburn, and D. Graves, J. Vac. Sci. Technol. A 17, 2447 (1999). 10.1116/1.581981
2. S. Park, F. Liao, J. M. Larson, S. L. Girshick, and M. R. Zachariah, Plasma Chem. Plasma Process. 0272-4324 24, 353 (2004). 10.1007/s11090-004-2273-1
3. S. Agarwal, G. W. W. Quax, M. C. M. van de Sanden, D. Maroudas, and E. S. Aydil, J. Vac. Sci. Technol. A 0734-2101 22, 71 (2004). 10.1116/1.1627767
4. J. Benedikt, S. Agarwal, D. J. Eijkman, W. Vandamme, M. Creatore, and M. C. M. van de Sanden, J. Vac. Sci. Technol. A 0734-2101 23, 1400 (2005). 10.1116/1.2006138
5. E. Stoffels, Y. A. Gonzalvo, T. D. Whitmore, D. L. Seymour, and J. A. Rees, Plasma Sources Sci. Technol. 0963-0252 16, 549 (2007). 10.1088/0963-0252/16/3/014
6. Atomic and Molecular Beam Methods, edited by, G. Scoles, (Oxford University Press, New York, 1988), Vol. I.
7. E. Knuth, Combust. Flame 0010-2180 103, 171 (1995). 10.1016/0010-2180(95) 00074-G
8. J. Benedikt, A. Consoli, M. Schulze, and A. von Keudell, J. Phys. Chem. A 1089-5639 111, 10453 (2007). 10.1021/jp072892w
9. V. Schulz-von der Gathen, L. Schaper, N. Knake, S. Reuter, K. Niemi, T. Gans, and J. Winter, J. Phys. D 0022-3727 41, 194004 (2008). 10.1088/0022-3727/41/19/194004
10. N. Knake, S. Reuter, K. Niemi, V. Schulz-von der Gathen, and J. Winter, J. Phys. D 0022-3727 41, 194006 (2008). 10.1088/0022-3727/41/19/194006
11. D. Ellerweg, J. Benedikt, N. Knake, V. Schulz-von der Gathen, and A. von Keudell (to be published). 1089-5639