Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

Applied Physics Letters

Volumn 93, Issue 7, 2008, Pages

  Andersson, Joakim ^a   Ehiasarian, Arutiun P ^b   Anders, Andŕ ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DC GENERATORS; ELECTROLYSIS; IONS; ISOTOPES; MAGNETRONS; METAL IONS; METALS; PLASMAS; POWER GENERATION; TITANIUM;

HIGH POTENTIAL; HIGH POWERS; HIGH YIELD; MAGNETRON SPUTTERING PLASMAS; METAL ION SPECIES; MULTIPLY CHARGED; SECONDARY ELECTRONS; TITANIUM IONS;

MAGNETRON SPUTTERING;

EID: 50249187588     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2973179     Document Type: Article

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