Absolute densities of N and excited N2 in a N2 plasma

Applied Physics Letters

Volumn 83, Issue 24, 2003, Pages 4918-4920

  Agarwal, Sumit ^a   Hoex, Bram ^b   Van De Sanden, M C M ^b   Maroudas, Dimitrios ^c   Aydil, Eray S ^a  

^a University of California   (United States)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY MEASUREMENT (OPTICAL); GALLIUM NITRIDE; IMPACT IONIZATION; INDUCTIVELY COUPLED PLASMA; MASS SPECTROMETRY; MOLECULAR PHYSICS; NITROGEN; PRESSURE EFFECTS;

ATOM DENSITIES; THRESHOLD ENERGY; THRESHOLD IONIZATION MASS SPECTROMETRY;

PLASMA THEORY;

EID: 0347300268     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1630843     Document Type: Article

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